Quantum Chemical Study on Decomposition and Polymer Deposition in Perfluorocarbon Plasmas: Molecular Orbital Calculations of Excited States of Perfluorocarbons
スポンサーリンク
概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-02-01
著者
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MOTOMURA Hideki
Department of Electrical and Electronic Engineering, Ehime University
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Tachibana Kunihide
Department of Electronic Science and Engineering, Kyoto University
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Nakamura Toshihiro
Departments of Cardiology, National Hospital Organization Kyushu Medical Center
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Nakamura T
Kyoto Univ. Kyoto Jpn
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Tachibana K
Department Of Electronic Science And Engineering Kyoto University
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