Stoffels E | Department Of Technical Physics Eindhoven University Of Technology
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概要
関連著者
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Tachibana Kunihide
Department Of Electronic Science And Engineering Kyoto University
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STOFFELS Eva
Department of Electronic Science and Engineering, Kyoto University
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Stoffels E
Department Of Technical Physics Eindhoven University Of Technology
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Tachibana Kunihide
Department of Electronic Science and Engineering, Kyoto University
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STOFFELS Winfred
Department of Electronic Science and Engineering, Kyoto University
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Stoffels Eva
Department Of Electronic Science And Engineering Kyoto University
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IMAI Shinichi
Matsushita Electronics Corporation
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Stoffels Winfred
Department Of Electronic Science And Engineering Kyoto University
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橘 邦英
Department of Electronic Science and Engineering, Kyoto University
著作論文
- Electron Attachment Mass Spectrometry for the Detection of Electronegative Species in a Plasma
- Angle Resolved Mass Spectrometry of Positive Ions Transmitted through High Aspect Ratio Channels in a Radio Frequency Discharge
- 材料プロセス用フルオロカーボンプラズマに関する基礎研究の進展 5.Polymerization in Fluorocarbon Plasmas