Analysis of Interface Property of SiGe-On-Insulator (SGOI) Substrate with a Strained-Si Layer for Nano-CMOS Device Applications(Session 4 Silicon Devices II,AWAD2006)

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概要

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• The effects of heat treatment on the electrical properties of strained-Si SiGe-on-insulator (SGOI) substrate as well as silicon-on-insulator (SOI) were examined. Furthermore, we proposed the optimized heat treatment processes for improving the interface properties of SGOI substrate and the electrical characteristics of SGOI MOSFET with a strained-Si channel. Both pre-rapid thermal process (RTP) and post-RTA annealing (PRA) are inevitable to obtain enhanced DC characteristics in strained Si SGOI n-MOSFET.

• 社団法人電子情報通信学会の論文
• 2006-06-26

著者

• Lee Seong-jae

  Nano Bio-electric Devices Team It Convergence & Components Laboratory Etri

• Baek In-bok

  Nano Bio-electric Devices Team It Convergence & Components Laboratory Etri

• Lee Woo-hyun

  Electronics Materials Kwangwoon University

• Lee Woo-Hyun

  Department of Electronic Materials Engineering, Kwangwoon University

• Cho Won-Ju

  Department of Electronic Materials Engineering, Kwangwoon University

• AHN Chang-Geun

  Nano-Bio Electronic Devices Team, Electronics and Telecommunications Research Institute

• YANG Jong-Heon

  Nano-Bio Electronic Devices Team, Electronics and Telecommunications Research Institute

• Ahn Chang-Geun

  Nano Bio-electric Devices Team, IT Convergence & Components Laboratory

• Yang Jong-Heon

  Nano Bio-electric Devices Team, IT Convergence & Components Laboratory

• Goo Hyun-Mo

  Department of Electronic Materials Engineering, Kwangwoon University

• Cho Won-ju

  Electronics Materials Kwangwoon University

• Ahn C‐g

  Electronics And Telecommunications Res. Inst. Daejon Kor

• Ahn Chang-geun

  Department Of Electronic And Electrical Engineering Pohang University Of Science And Technology

• Cho W‐j

  Lg Semicon Co. Ltd.

• Goo Hyun-mo

  Department Of Electronic Materials Engineering Kwangwoon University

• Cho W‐j

  Electronics Materials Kwangwoon University

• Cho Won-ju

  Department Of Electronic Material Engineering Kwangwoon University

• Ahn Chang-geun

  Nano Bio-electric Devices Team It Convergence & Components Laboratory Etri

• Yang Jong-heon

  Nano-bio Electronic Devices Team Electronics And Telecommunications Research Institute

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