Fabrication of Nonvolatile Nano Floating Gate Memory with Self-Assembled Metal-Oxide Nano Particles Embedded in Polyimide
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概要
- 論文の詳細を見る
A nonvolatile nano floating gate memory (NFGM) device with self-assembled In2O3 nano particles embedded in a polyimide (PI) layer was fabricated and its electrical properties were evaluated. Self-assembled In2O3 nano particles with an average diameter of 7 nm and a density of $5.8\times 10^{11}$ cm-2 were fabricated by chemical reaction between indium and polyamic acid during a curing process at 400 °C for 1 h. Then, this NFGM device has a double control layer consisting of PI and SiO2 insulator layers. The programming and erasing speeds of this device were 200 ms and 1 s, respectively. Then, the memory window rapidly decreased from 4 V at the initial to 0.5 V at 50 s, and then it was maintained after $10^{3}$ s.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-06-25
著者
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Kim Eun
Quantum-function Spinics Lab. And Department Of Physics Hanyang University
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Lee Tae
Quantum-function Spinics Lab. And Department Of Physics Hanyang University
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Kim Seon
Quantum-function Spinics Lab. And Department Of Physics Hanyang University
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Koo Hyun-mo
Department Of Electronic Material Engineering Kwangwoon University
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Lee Dong
Quantum-function Spinics Lab. And Department Of Physics Hanyang University
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Cho Won-ju
Department Of Electronic Material Engineering Kwangwoon University
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Kim Young-ho
Department Of Materials Engineering Hanyang University
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Cho Won-Ju
Department of Electronics Materials Engineering, Kwangwoon University, Seoul 139-701, Korea
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Kim Young-Ho
Department of Advanced Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea
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Kim Eun
Quantum-Function Research Laboratory and Department of Physics, Hanyang University, Seoul 133-791, Korea
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Koo Hyun-Mo
Department of Electronics Materials Engineering, Kwangwoon University, Seoul 139-701, Korea
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Lee Dong
Quantum-Function Research Laboratory and Department of Physics, Hanyang University, Seoul 133-791, Korea
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