Electrical characterization of nano-floating gated silicon-on-insulator memory with In2O3 nano-particles embedded in polyimide insulator (Silicon devices and materials: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))

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概要

• 論文の詳細を見る

• We fabricated the floating gate for silicon-on-insulator (SOI) nonvolatile memory devices with In_2O_3 nano-particles embedded in polyimide insulator. Self-assembled In_2O_3 nano-particles were created by chemical reaction between the biphenyl dianhydride-p-phenylenediamine polymer precursor and indium films. The particles size and density of In_2O_3 nano-particles were 7 nm and 6×10^<11>cm^<-2>, respectively. The current-voltage and retention time of fabricated device were characterized by using semiconductor parameter analyzer. A significant threshold voltage shift of fabricated nano-floating gate memory devices obtained, because of the charging effects of In_2O_3 nano-particles. And a memory window measured about 1V at initial status.

• 社団法人電子情報通信学会の論文
• 2007-06-18

著者

• KIM Eun

  Quantun-Function Spinics Lab. and Dept. of Physics, Hanyang University

• Kim Seon

  Hanyang Univ. Seoul Kor

• Kim Eun

  Quantum-function Spinics Lab. Department Of Physics Hanyang University

• Kim Seon

  Quantum-function Spinics Lab. Department Of Physics Hanyang University

• Cho Won-Ju

  Department of Electronic Materials Engineering, Kwangwoon University

• Cho Won-ju

  Electronics Materials Kwangwoon University

• KIM Young-Ho

  Department of Mechanical Engineering, Hanyang University

• Kim Young-ho

  Department Of Materials Science And Engineering Hanyang University

• Kim Eun

  Quantum-function Spinics Lab. And Department Of Physics Hanyang University

• Lee Tae

  Quantum-function Spinics Lab. And Department Of Physics Hanyang University

• LEE Dong

  Quantum-Function Spinics Lab. and Department of Physics, Hanyang University

• KOO Hyun-Mo

  Department of Electronic Material Engineering, Kwangwoon University

• Kim Seon

  Quantum-function Spinics Lab. And Department Of Physics Hanyang University

• Koo Hyun-mo

  Department Of Electronic Material Engineering Kwangwoon University

• Lee Dong

  Quantum-function Spinics Lab. And Department Of Physics Hanyang University

• Cho Won-ju

  Department Of Electronic Material Engineering Kwangwoon University

• Kim Young-ho

  Department Of Materials Engineering Hanyang University

• Kim Young-Ho

  Department of Advanced Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea

• Kim Eun

  Quantum-Function Research Laboratory and Department of Physics, Hanyang University, Seoul 133-791, Korea

• Lee Dong

  Quantum-Function Research Laboratory and Department of Physics, Hanyang University, Seoul 133-791, Korea

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