A Novel Contactless and Nondestructive Measurement Method of Surface Recombination Velocity on Silicon Surfaces by Photoluminescence
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-01-30
著者
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HASEGAWA Hideki
Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University
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SAITOH Toshiya
Research Center for Interface Quantum Electronics, Hokkaido University
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Saitoh T
Semiconductor Device Group Advanced Devices Development Center Matsushita Electric Industrial Co. Lt
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SAWADA Takayuki
Research Center for Interface Quantum Electronics, Hokkaido University
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NISHIMOTO Youichiro
Department of Electrical Engineering, Hokkaido University
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Saitoh Toshiya
Research Center For Interface Quantum Electronics Hokkaido University
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Sawada Takayuki
Research Center For Interface Quantum Electronics Hokkaido University
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Nishimoto Youichiro
Department Of Electrical Engineering Hokkaido University
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