In-Situ XPS Study of Etch Chemistry of Methane-Based RIBE of InP Using N_2
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概要
- 論文の詳細を見る
- 2000-08-28
著者
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HASEGAWA Hideki
Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University
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Hashizume Tamotsu
Research Center For Integrated Quantum Electronics Hokkaido University
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TAKAHASHI Hiroshi
Research Center for Integrated Quantum Electronics, and Graduate School of Electronics and Informati
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JIN Zhi
Research Center for Interface Quantum Electronics (RCIQE), Hokkaido University
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Jin Z
Ecole Polytechnique De Montreal Quebec Can
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Jin Zhi
Research Center For Integrated Quantum Electronics And Graduate School Of Electronics And Informatio
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Hashizume Tamotsu
Research Center For Integrated Quantum Electronics (rciqe) And Graduate School Of Information Scienc
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Hasegawa Hideki
Research Center for Integrated Quantum Electronics (RCIQE) and Graduate School of Information Science and Technology, Hokkaido University, North 13, West 8, Kita-ku, Sapporo 060-8628, Japan
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