Method for Detecting Defects in Silicon-On-Insulator Using Capacitance Transient Spectroscopy

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-05-15

著者

• WANG Dong

  Art, Science and Technology Center for Cooperative Research, Kyushu University

• NAKASHIMA Hiroshi

  Art, Science and Technology Center for Cooperative Research, Kyushu University

• ZHAO Liwei

  Art, Science and Technology Center for Cooperative Research, Kyushu University

• Nakashima Hideharu

  Interdisciplinary Graduate School Of Engineering Sciences Kyushu University

• NOGUCHI Takashi

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

• ITANI Kousuke

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

• WANG Junli

  Art, Science and Technology Center for Cooperative Research, Kyushu University

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