Measurement of Strain in Freestanding Si/SixNy Membrane by Convergent Beam Electron Diffraction and Finite Element Method
スポンサーリンク
概要
- 論文の詳細を見る
Strain in a bridge-shaped freestanding Si membrane (FSSM) induced by depositing an amorphous SixNy layer was measured by convergent-beam electron diffraction (CBED) and the finite element method (FEM). CBED results show that the strain magnitude depends negatively on the FSSM thickness, and compressive strain along the length of the FSSM is increased by approximately 0.1% at the end of the FSSM. FEM is used as a supplementary method to CBED for calculating the strain relaxation in three-dimension in the FSSM.
- 2010-09-25
著者
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WANG Dong
Art, Science and Technology Center for Cooperative Research, Kyushu University
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NAKASHIMA Hiroshi
Art, Science and Technology Center for Cooperative Research, Kyushu University
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NAKASHIMA Hideharu
Faculty of Engineering Sciences, Kyushu University
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Ikeda Ken-ichi
Faculty Of Engineering Sciences Kyushu University
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Ikeda Ken-ichi
Faculty of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Gao Hongye
Faculty of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Hata Satoshi
Faculty of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Nakashima Hideharu
Faculty of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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