Low-Temperature Fabrication of Polycrystalline Si Thin Film Using Al-Induced Crystallization without Native Al Oxide at Amorphous Si/Al Interface

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概要

• 論文の詳細を見る

• Low-temperature fabrication of polycrystalline silicon (poly-Si) thin film has been performed by Al-induced crystallization (AIC), and the structural properties have been investigated. In our experiments, to prevent native oxidation of Al film, an amorphous silicon (a-Si)/Al bilayer was formed on the SiO2/Si substrate by electron beam evaporation without breaking the vacuum. The a-Si/Al/SiO2/Si structure was then heated at a low temperature of 400°C to induce AIC. It was confirmed that layer exchange of the a-Si/Al bilayer is induced even though there is no native oxidation of Al film, which was demonstrated by scanning transmission electron microscopy and energy dispersive X-ray analysis. The mechanism for layer exchange of the a-Si/Al bilayer has been discussed. Furthermore, it was verified by scanning electron microscopy and spectroscopic ellipsometry that the a-Si/Al thickness ratio of roughly $1:1$ is suitable to achieve a flat surface morphology of poly-Si. In addition, it was found, by X-ray diffraction and orientation imaging microscopy, that the Si(111)-oriented grain becomes dominant with decreasing thickness of the a-Si/Al bilayer.

• 2005-07-15

著者

• NAKASHIMA Hiroshi

  Art, Science and Technology Center for Cooperative Research, Kyushu University

• Sugimoto Youhei

  Interdisciplinary Graduate School Of Engineering Sciences Kyushu University

• TAKATA Naoki

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

• HIROTA Takeshi

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

• IKEDA Ken-ichi

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

• YOSHIDA Fuyuki

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

• Nakashima Hideharu

  Interdisciplinary Graduate School Of Engineering Sciences Kyushu University

• Hirota Takeshi

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan

• Ikeda Ken-ichi

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan

• Takata Naoki

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan

• Nakashima Hideharu

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan

• Yoshida Fuyuki

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan

• Nakashima Hiroshi

  Art, Science and Technology Center for Cooperative Research, Kyushu University, 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan

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