Low-Temperature Growth of Thin Silicon Nitride Film by Electron Cyclotron Resonance Plasma Irradiation

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2004-01-15

著者

• WANG Dong

  Art, Science and Technology Center for Cooperative Research, Kyushu University

• NAKASHIMA Hiroshi

  Art, Science and Technology Center for Cooperative Research, Kyushu University

• Sugimoto Youhei

  Department Of Applied Science For Electronics And Materials Interdisciplinary Graduate School Of Eng

• Sugimoto Youhei

  Interdisciplinary Graduate School Of Engineering Sciences Kyushu University

• Ikeda K

  Interdisciplinary Graduate School Of Engineering Sciences Kyushu University

• IKEDA Ken-ichi

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

• NAKASHIMA Hideharu

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

• ZHAO Liwei

  Art, Science and Technology Center for Cooperative Research, Kyushu University

• LUU Nam

  Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

• Luu Nam

  Interdisciplinary Graduate School Of Engineering Sciences Kyushu University

• Nakashima Hideharu

  Interdisciplinary Graduate School Of Engineering Sciences Kyushu University

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