Sugimoto Youhei | Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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概要
関連著者
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Sugimoto Youhei
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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NAKASHIMA Hiroshi
Art, Science and Technology Center for Cooperative Research, Kyushu University
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IKEDA Ken-ichi
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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WANG Dong
Art, Science and Technology Center for Cooperative Research, Kyushu University
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Sugimoto Youhei
Department Of Applied Science For Electronics And Materials Interdisciplinary Graduate School Of Eng
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TAKATA Naoki
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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HIROTA Takeshi
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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YOSHIDA Fuyuki
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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NAKASHIMA Hideharu
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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ZHAO Liwei
Art, Science and Technology Center for Cooperative Research, Kyushu University
著作論文
- Electrical and Structural Properties of TaN Gate Electrodes Fabricated by Wet Etching Using NH_4OH/H_2O_2 Solution and Hf Metal Hard Mask
- Low-Temperature Fabrication of Polycrystalline Si Thin Film Using Al-Induced Crystallization without Native Al Oxide at Amorphous Si/Al Interface
- Low-Temperature Growth of Thin Silicon Nitride Film by Electron Cyclotron Resonance Plasma Irradiation
- Low-Temperature Fabrication of Polycrystalline Si Thin Film Using Al-Induced Crystallization without Native Al Oxide at Amorphous Si/Al Interface
- Low-Temperature Growth of Thin Silicon Nitride Film by Electron Cyclotron Resonance Plasma Irradiation
- Effect of Ion Mass and Ion Energy on Low-Temperature Deposition of Polycrystalline-Si Thin Film on SiO2 Layer by Using Sputtering-Type Electron Cyclotron Resonance Plasma