Sugimoto Youhei | Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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概要
関連著者
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Sugimoto Youhei
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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NAKASHIMA Hiroshi
Art, Science and Technology Center for Cooperative Research, Kyushu University
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IKEDA Ken-ichi
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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WANG Dong
Art, Science and Technology Center for Cooperative Research, Kyushu University
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Sugimoto Youhei
Department Of Applied Science For Electronics And Materials Interdisciplinary Graduate School Of Eng
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TAKATA Naoki
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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HIROTA Takeshi
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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YOSHIDA Fuyuki
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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NAKASHIMA Hideharu
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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ZHAO Liwei
Art, Science and Technology Center for Cooperative Research, Kyushu University
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Luu Nam
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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Nakashima Hideharu
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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中島 寛
九州大学産学連携センター
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中島 寛
先端科学技術共同研究センター
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SUGIMOTO Youhei
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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YAMAMOTO Keisuke
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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WANG Dong
Advanced Science and Technology Center for Cooperative Research, Kyushu University
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Ikeda K
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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中島 寛
九大 産学連携セ
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LUU Nam
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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Zhao Liwei
Advanced Science And Technology Center For Cooperative Research Kyush Univ.
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Wang Junli
Advanced Science And Technology Center For Cooperative Research Kyushu Univ.
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Saitou Taishi
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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Yamamoto Keisuke
Kyushu Univ. Fukuoka Jpn
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Nakashima Hiroshi
Advanced Science And Technology Center For Cooperative Research Kyushu University
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Yamamoto Keisuke
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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Zhao Liwei
Art, Science and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Wang Junli
Advanced Science and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Hirota Takeshi
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
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Ikeda Ken-ichi
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
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Ikeda Ken-ichi
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Takata Naoki
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
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Luu Nam
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Nakashima Hideheru
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Zhao Liwei
Advanced Science and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Nakashima Hideharu
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
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Yoshida Fuyuki
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
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Sugimoto Youhei
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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山本 圭介
九州大学大学院総合理工学府
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Saitou Taishi
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Nakashima Hiroshi
Art, Science and Technology Center for Cooperative Research, Kyushu University, 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan
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Nakashima Hiroshi
Advanced Science and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Nakashima Hiroshi
Advanced Science and Technology Center for Cooperative
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Wang Dong
Art, Science and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Wang Dong
Advanced Science and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
著作論文
- Electrical and Structural Properties of TaN Gate Electrodes Fabricated by Wet Etching Using NH_4OH/H_2O_2 Solution and Hf Metal Hard Mask
- Low-Temperature Fabrication of Polycrystalline Si Thin Film Using Al-Induced Crystallization without Native Al Oxide at Amorphous Si/Al Interface
- Low-Temperature Growth of Thin Silicon Nitride Film by Electron Cyclotron Resonance Plasma Irradiation
- Low-Temperature Fabrication of Polycrystalline Si Thin Film Using Al-Induced Crystallization without Native Al Oxide at Amorphous Si/Al Interface
- Low-Temperature Growth of Thin Silicon Nitride Film by Electron Cyclotron Resonance Plasma Irradiation
- Effect of Ion Mass and Ion Energy on Low-Temperature Deposition of Polycrystalline-Si Thin Film on SiO2 Layer by Using Sputtering-Type Electron Cyclotron Resonance Plasma