Toxicity of Silicon Compounds in Semiconductor Industries
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概要
- 論文の詳細を見る
Toxicity of Silicon Compounds in Semiconductor Industries: Hiroshi NAKASHIMA, et al. Department of Preventive Medicine and Public Health, School of Medicine, Keio University - The toxicities of silane (SiH_4), tetraethoxysilane (Si(OC_2H_5)_4, TEOS) and dichlorosilane (SiH_2Cl_2, DCS) were reviewed in order to compare the toxicological properties of silicon compounds used in the semiconductor industry. Silane and TEOS showed similar toxicities, characterized by nephrotoxicity. Mice subjected to silane (2500, 5000 and 10000 ppm) or TEOS (1000 ppm) acute exposure developed acute tubular necrosis. Tubulo-interstitial nephritis was seen in mice which were subjected to an acute inhalation study and survived 2 wk of the observation period or those subjected to subacute inhalation studies of TEOS (100 and 200 ppm for 2 or 4 wk). Silane and TEOS, however, differed in the concentration at which they showed signs of toxicity. This may be due to their solubility in water and other metabolic factors, but their metabolic pathways have not yet been elucidated. TEOS injured nasal mucose (1000 ppm for 2 h or more and 50, 100 and 200 ppm for 2 or 4 wk). It was observed at a lower concentration than nephrotoxicity in the 50 and 100 ppm subacute inhalation study. On the other hand, silane caused nasal mucosal lesions only at 5000 or 10000 ppm for acute inhalation, and those of subacute inhalation were mild (1000 ppm for 2 or 4 wk). DCS showed another type of adverse effect. It was an irritant and/or a corrosive agent to the respiratory tract in the acute (64 ppm for 1, 2, 4 or 8 h) and subacute (32 ppm for 2 or 4 wk) inhalation study. The fate of DCS in air was also studied and it was shown to form small particles including silicon and chlorine (Cl) atoms. Cl seems to play an important role in the toxicity of DCS.
- 社団法人日本産業衛生学会の論文
著者
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Nakashima Hiroshi
Department Of Cardiology Nagasaki Citizens Hospital
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上村 隆元
杏林大学 医学部 衛生学公衆衛生学教室
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Takebayashi T
Department Of Preventive Medicine And Public Health School Of Medicine Keio University
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TAKEBAYASHI Toru
Department of Preventive Medicine and Public Health, Keio University School of Medicine
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UEMURA Takamoto
Department of Preventive Medicine and Public Health, School of Medicine, Keio University
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OMAE Kazuyuki
Department of Preventive Medicine and Public Health, School of Medicine, Keio University
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ISHIZUKA Chizuru
Department of Preventive Medicine and Public Health, School of Medicine, Keio University
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Omae Kazuyuki
Department Of Preventive Medicine And Public Health School Of Medicine Keio University
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Omae Kazuyuki
慶応義塾大学 医学部衛生学公衆衛生学
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Omae Kazuyuki
慶應義塾大学医学部衛生学公衆衛生学教室
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Omae Kazuyuki
Department Of Preventive Medicine And Public Health Keio University School Of Medicine
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Omae Kazuyuki
東京医科歯科大学難治疾患研究所 分子疫学
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Takahashi Ken
Department Of Preventive Medicine And Public Health School Of Medicine Keio University
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Nakashima Hiroshi
Department Of Preventive Medicine And Public Health National Defense Medical College
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Takebayashi Toru
Department Of Preventive Medicine And Public Health Keio University School Of Medicine
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Oda Kenichi
Department Of Preventive Medicine & Public Health School Of Medicine Keio University
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Takahashi Ken
Japan Industrial Safety And Health Association
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Nakashima H
Hyogo University
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Nakashima Hideharu
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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Uemura Takamoto
Department Of Preventive Medicine And Public Health School Of Medicine Keio University
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Ishizuka Chizuru
Department Of Preventive Medicine And Public Health School Of Medicine Keio University
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Nakashima Hiroshi
Department Of Biology Faculty Of Science Okayama University
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Takebayashi Toru
Department of Health Sciences, Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi
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