Effects of Channel Thinning on Threshold Voltage Shift in Ultrathin-Body Silicon Nanocrystal Memories
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概要
- 論文の詳細を見る
We propose an ultrathin body silicon nanocrystal memory with a large threshold voltage shift ($\Delta V_{\text{th}}$) and a small write/erase threshold voltage ($V_{\text{th}}$) distribution. Experimental results show that $\Delta V_{\text{th}}$ increases when body thickness decreases to 6 nm. Although $\Delta V_{\text{th}}$ also increases in an ultranarrow channel, the ultrathin-body memory has a much smaller write/erase $V_{\text{th}}$ distribution than the ultranarrow-channel memory. It is confirmed by simulation that a large $\Delta V_{\text{th}}$ in an ultranarrow channel originates from a larger increase in the potential of a thin body than in that of a thick body.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-04-15
著者
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YANAGIDAIRA Kosuke
Graduate School of Science and Engineering, Chuo University
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Saitoh Masumi
Institute Of Industrial Science University Of Tokyo
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HIRAMOTO Toshiro
Institute Industrial Science, The University of Tokyo
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