201 ステレオ法による三次元形状計測に関する研究 : 特徴点抽出手法の検討(精密/微細加工と評価,オーガナイズドセッション)

概要

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SEM (scanning electron microscope) is used for semiconductor device production and observation of the microstructure in the MEMS technology. However, there is a problem that information is not provided at all about the height of the object. In this study, we used technology called the Means of Binocular Stereopsis which restored height information from the 2D stereo pair images. The matching technique to find the corresponding point of the object between stereo pair images is necessary. We used shape based pattern matching and performed 3D measurement and shape reconstruction of SEM images. Moreover, it looks for the most suitable each image a Feature points extraction method.
一般社団法人日本機械学会の論文
2008-09-12