508 放電によるマイクロ構造の創成に関する基礎的研究(OS8-(2) 精密微細加工と評価,オーガナイズドセッション)

概要

論文の詳細を見る
The electric discharge machining (EDM) is widely used for machining of various fine parts, because it can machine various conductive materials in three dimensional shapes independent of their strength. However, its machining accuracy is limited, since its machining principle is based on melting of materials. Therefore, nano-accuracy machining is thought to be difficult by EDM. This study aims to manufacture the micro-structures with nano-accuracy bu EDM. In this report, as the first step, several EDM experiments for micro-holes were conducted to the stainless workpieces with copper fine electrodes to search the optimum conditions for high-removal rate and high-accuracy EDM, and micro-groove formation was also conducted under obtained optimal conditions to verify the machining performance.
2009-08-25