307 真空中におけるマイクロ・ナノ加工機構に関する研究(精密/微細加工と評価)

概要

論文の詳細を見る
Micromachining progresses rapidly in recent years. The exploratory research has approached to a level of accessing a single molecule or atom. Micro-Meso Mechanical Manufacturing(M^4)offers accessibility to different kinds of material in a 3 dimensional way. There are, however, many scientific and technological barriers encountered in pragmatic implementation of M^4. One of them is the surface chemistry effects. When machining parts at micro scale, it is recognized that the surface-area-to-volume ratio will be increased in both chips and the resulting part as compared to conventional(macro)machining process. Then, in this research, a micro lathe which is installable and operational inside SEM vacuum chamber has been designed and developed. At such oxygen-free condition, cutting tests are conducted to understand surface chemistry effects on micromachining.
一般社団法人日本機械学会の論文
2006-09-14