MNM-1B-1 難加工材料へのパルスレーザーマイクロ加工(セッション 1B 情報・精密機器におけるマイクロ・ナノテクノロジー1)

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We investigated micro machining properties on hard and brittle single crystal materials using an ultrashort high-intensity laser processing technique. Micro groove structures were fabricated on the surface of diamond and lithium niobate by line scanned focused laser beam etching of fundamental oscillation wavelength (1064nm) Nd : YAG pico-second pulsed laser system. Each material showed different dimensional properties of the fabricated grooves. Rough and partially damaged surface was obtained on lithium niobate due to anisotropy and pyroelectricity of the material but it was overcome by optimization of the scanning rate and the pulse energy. We found laser power density depended cross-sectional deformation of the groove, which suggested nonlinear optical process on the etching.
2010-10-12