The Stability of Nano Fwned Silica Particles and Its Influence on Chemical Mechanical Planarization for Interlayer Dielectrics

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-07-15

著者

• Paik U

  Department Of Ceramic Engineering Hanyang University

• Paik Ungyu

  Department Of Ceramic Engineering Hanyang University

• Park J‐g

  Nano-soi Process Laboratory Hanyang University

• Park Jea-gun

  Nano-SOI Process Laboratory, Hanyang University

• KATOH Takeo

  Nano-SOI Process Laboratory, Hanyang University

• JUNG Yeon-Gil

  Department of Animal Science, Daegu University

• Park Jea-gun

  Nano-soi Process Laboratory Hanyang University

• Jung Yeon-gil

  Department Of Animal Science Daegu University

• Jung Yeon-gil

  Department Of Ceramic Science And Engineering Changwon National University

• KATOH Takeo

  Advanced Semiconductor Material and Device Development Center, Hanyang University

• PARK Jea-Gun

  Advanced Semiconductor Material and Device Development Center, Hanyang University

• KIM Jongphil

  Department of Ceramic Engineering, Hanyang University

• Kim Jongphil

  Department Of Ceramic Engineering Hanyang University

• Park Jea-gun

  Advanced Semiconductor Material And Device Development Center Hanyang University

• Park Jea-gun

  Advanced Semiconductor Material & Device Development Center Hanyang University

• Katoh Takeo

  Nano-soi Process Laboratory Hanyang University

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