Effect of Calcination Process on Synthesis of Ceria Particles, and Its Influence on Shallow Trench Isolation Chemical Mechanical Planarization Performance
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-06-15
著者
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KIM Sang-Kyun
Department of Electronic Engineering, Inha University
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Kim S‐j
Department Of Ceramic Engineering Hanyang University
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Kang H‐g
Nano-soi Process Laboratory Hanyang University
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Paik U
Department Of Ceramic Engineering Hanyang University
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Paik Ungyu
Department Of Ceramic Engineering Hanyang University
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Kim S‐k
Hanyang Univ. Seoul Kor
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Kim Dae-hyung
Kctech
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Park J‐g
Nano-soi Process Laboratory Hanyang University
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Park Jea-gun
Nano-SOI Process Laboratory, Hanyang University
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KANG Hyun-Goo
Nano-SOI Process Laboratory, Hanyang University
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KIM Dae-Hyeong
KCTech
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Park Jea-gun
Advanced Semiconductor Material And Device Development Center Hanyang University
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