Crystal Originated Particle Induced Isolation Failure in Czochralski Silicon Wafers

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-01-15

著者

• Park Jea-gun

  Nano Soi Process Laboratory Hanyang University

• Kwack Kae-dal

  Advanced Semiconductor Material And Device Development Center Hanyang University

• PARK Jea-Gun

  Advanced Semiconductor Material and Device Development Center, Hanyang University

• Park Jea-gun

  Advanced Semiconductor Material And Device Development Center Hanyang University

• Park Jea-gun

  Advanced Semiconductor Material & Device Development Center Hanyang University

• Lee Gon-sub

  Nano Soi Process Laboratory Hanyang University

• Lee Gon-sub

  Advanced Semiconductor Material And Devices Development Center Hanyang University

• Park Jung-min

  Samsung Electronics Co.

• Kwack Kae-dal

  Advanced Semiconductor Material & Devices Development Center Hanyang University

• Lee Gon-sub

  Advanced Semiconductor Material & Devices Development Center Hanyang University

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