Spectral Analyses of the Impact of Nanotopography of Silicon Wafers on Oxide Chemical Mechanical Polishing : Semiconductors

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2001-08-15

著者

• Park Jea-gun

  Nano-SOI Process Laboratory, Hanyang University

• KATOH Takeo

  Nano-SOI Process Laboratory, Hanyang University

• Park Jea-gun

  Nano-soi Process Laboratory Hanyang University

• KATOH Takeo

  Advanced Semiconductor Material and Device Development Center, Hanyang University

• PARK Jea-Gun

  Advanced Semiconductor Material and Device Development Center, Hanyang University

• YOO Hyung-Chul

  Advanced Semiconductor Material and Device Development Center, Hanyang University

• PARK Jin-hyung

  Advanced Semiconductor Material and Device Development Center, Hanyang University

• Park Jea-gun

  Advanced Semiconductor Material And Device Development Center Hanyang University

• Park Jea-gun

  Advanced Semiconductor Material & Device Development Center Hanyang University

• Yoo Hyung-chul

  Advanced Semiconductor Material And Device Development Center Hanyang University

• Katoh Takeo

  Nano-soi Process Laboratory Hanyang University

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