PARK Jin-hyung | Advanced Semiconductor Material and Device Development Center, Hanyang University
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概要
関連著者
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PARK Jin-hyung
Advanced Semiconductor Material and Device Development Center, Hanyang University
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Park Jea-gun
Advanced Semiconductor Material & Device Development Center Hanyang University
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Park Jea-gun
Nano-SOI Process Laboratory, Hanyang University
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KATOH Takeo
Nano-SOI Process Laboratory, Hanyang University
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Park Jea-gun
Nano-soi Process Laboratory Hanyang University
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KATOH Takeo
Advanced Semiconductor Material and Device Development Center, Hanyang University
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PARK Jea-Gun
Advanced Semiconductor Material and Device Development Center, Hanyang University
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Park Jea-gun
Advanced Semiconductor Material And Device Development Center Hanyang University
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Katoh Takeo
Nano-soi Process Laboratory Hanyang University
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Paik U
Department Of Ceramic Engineering Hanyang University
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Park J‐g
Nano-soi Process Laboratory Hanyang University
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Kwack Kae-dal
Nano Soi Process Laboratory Hanyang University
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Kwack Kae-dal
Advanced Semiconductor Material And Device Development Center Hanyang University
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PAIK Ungyu
Advanced Semiconductor Material and Device Development Center, Hanyang University
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Kwack Kae-dal
Advanced Semiconductor Material & Devices Development Center Hanyang University
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YOO Hyung-Chul
Advanced Semiconductor Material and Device Development Center, Hanyang University
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Yoo Hyung-chul
Advanced Semiconductor Material And Device Development Center Hanyang University
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Paik Ungyu
Division of Advanced Materials Science Engineering, Hanyang University, Seoul 133-791, Korea
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Park Jea-Gun
Advanced Semiconductor Materials and Devices Development Center, Hanyang University, Seoul 133-791, Korea
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Hwang Hee-Sub
Advanced Semiconductor Materials and Devices Development Center, Hanyang University, Seoul 133-791, Korea
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Yi Sok-Ho
Advanced Semiconductor Materials and Devices Development Center, Hanyang University, Seoul 133-791, Korea
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Park Jin-Hyung
Advanced Semiconductor Materials and Devices Development Center, Hanyang University, Seoul 133-791, Korea
著作論文
- Effect of Nanotopography on Chemical Mechanical Polishing : Polishing Depth, Pad, Slurry and Interlayer Film Dependencies
- Effect of Nanotopography on Chemical Mechanical Polishing : Polishing Depth, Pad, Slurry and Interlayer Film Dependencies
- Spectral Analyses of the Impact of Nanotopography of Silicon Wafers on Oxide Chemical Mechanical Polishing : Semiconductors
- Effect of Organic Additive on Surface Roughness of Polycrystalline Silicon Film after Chemical Mechanical Polishing