Effect of Chemicals and Slurry Particles on Chemical Mechamical Polishing of Polyimide

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-03-15

著者

• Park Jin-goo

  Department Of Metallurgy And Materials Engineering Micro Biochip Center Hanyang University

• Park Jin-goo

  Department Of Metallurgy And Materials Engineering Hanyang University

• Park Jin-goo

  Department Of Metallurgy And Materials Engineering Center For Electronic Materials And Components Ha

• Park Jea-gun

  Advanced Semiconductor Material And Device Development Center Hanyang University

• KIM Hyoung-Gyun

  Department of Metallurgy and Materials Engineering, Hanyang University

• AN Yoo-Min

  Department of Mechanical Engineering, Hanyang University

• MOON Doo-Kyung

  Hanwha Group R&D Center

• An Yoo-min

  Department Of Mechanical Engineering Hanyang University

• Moon Doo-kyung

  Hanwha Group R&d Center

• Kim Hyoung-gyun

  Department Of Metallurgy And Materials Engineering Hanyang University

• Park Jin-Goo

  Department of Bio-Nano Technology and Micro Biochip Center, Hanyang University, Ansan 426-791, Korea

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