Passivation and Etching of Wafer Surfaces in HF-H_2O_2-WA Solutions
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-10-15
著者
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Park Jin-goo
Department Of Metallurgy And Materials Engineering Micro Biochip Center Hanyang University
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Eom Dae-hong
Department Of Metallurgy And Materials Engineering Center For Electronic Materials And Components Ha
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Kim Ky-sub
Department Of Chemistry Chonbuk National University
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KIM Ky-Sub
Department of Chemistry, Chonbuk National University
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EOM Dae-Hong
Department of Metallurgy and Materials Engineering, Center for Electronic Materials and Components, Hanyang University
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Eom Dae-Hong
Department of Materials Engineering, Hanyang University, Ansan 426-791, Korea
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PARK Jin-Goo
Department of Metallurgy and Materials Engineering, Center for Electronic Materials and Components, Hanyang University
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Park Jin-Goo
Department of Bio-Nano Technology and Micro Biochip Center, Hanyang University, Ansan 426-791, Korea
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