Particle Removal and Its Mechanism on Hydrophobic Silicon Wafer in Highly Diluted NH_4OH Solutions with an Added Surfactant : Semiconductors

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2001-11-15

著者

• LEE Sang-Ho

  Department of Neurosurgery, Wooridul Spine Hospital

• Park Jin-goo

  Department Of Metallurgy And Materials Engineering Micro Biochip Center Hanyang University

• Park Jin-goo

  Department Of Metallurgy And Materials Engineering Hanyang University

• Park Jin-goo

  Department Of Metallurgy And Materials Engineering Center For Electronic Materials And Components Ha

• Kim S‐y

  Anam Semiconductor Co. Inc. Bucheon Kor

• Kim S‐y

  Anam Semiconductor Co. Inc. Kyounggi-do Kor

• Kim Sang-yong

  Department Of Metallurgy And Materials Engineering Hanyang University

• Lee Sang-ho

  Department Of Architectural Engineering Yonsei University

• Lee Sang-ho

  Department Of Metallurgy And Materials Engineering Hanyang University

• Lee Sang-ho

  Department Of Agricultural Economics Sunchon National University

• Kim Sang-Yong

  Department of Materials Engineering, Hanyang University, Ansan 426-791, Korea

• Park Jin-Goo

  Department of Bio-Nano Technology and Micro Biochip Center, Hanyang University, Ansan 426-791, Korea

関連論文

• Two-Level Anterior Lumbar Interbody Fusion With Percutaneous Pedicle Screw Fixation: A Minimum 3-Year Follow-up Study
• Influence of Defect Segregation on the Electrical Properties of Nb-doped SrTiO_3 Grain Boundary Layer
• Two-Level Anterior Lumbar Interbody Fusion With Percutaneous Pedicle Screw Fixation : A Minimum 3-Year Follow-up Study
• Replication of the Wellcome Trust genome-wide association study on essential hypertension in a Korean population
• Surgical Experience of Gas-Containing Disk Herniation
• Effect of a Guard-Ring on the Leakage Current in a Si-PIN X-Ray Detector for a Single Photon Counting Sensor
• Effect of a guard-ring on the leakage current in a Si-PIN x-ray detector for a single photon counting sensor (Electron devices: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))
• Effect of a guard-ring on the leakage current in a Si-PIN x-ray detector for a single photon counting sensor (Silicon devices and materials: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))
• Influence of Grain boundary Layers on the Dielectric Relaxation of Nb-Doped SrTiO_3
• Foraminoplastic Ventral Epidural Approach for Removal of Extruded Herniated Fragment at the L5-S1 Level
• Effect of Intervertebral Disk Degeneration on Spinal Stenosis During Magnetic Resonance Imaging With Axial Loading
• Influence of Lumbar Lordosis Restoration on Thoracic Curve and Sagittal Position in Lumbar Degenerative Kyphosis Patients
• Reaction of Ozone and H_2O_2 in NH_4OH Solutions and Their Reaction with Silicon Wafers
• Field-Effect Conductance Activation Energy in Polycrystalline Silicon Thin-Film Transistors after Bias Stress
• Point of Use Regeneration of Oxide Chemical Mechanical Planarization Slurry by Filtrations
• Symptomatic Isolated Lumbar Interdural Arachnoid Cyst : Case Report
• Comparative Study of Neck Pain in Relation to Increase of Cervical Epidural Pressure During Percutaneous Endoscopic Lumbar Discectomy
• Improvement of Xylitol Production by Controlling Oxygen Supply in Candida parapsilosis
• Effect of Chemicals and Slurry Particles on Chemical Mechamical Polishing of Polyimide
• Particle Removal and Its Mechanism on Hydrophobic Silicon Wafer in Highly Diluted NH_4OH Solutions with an Added Surfactant : Semiconductors
• Function of the Myogenin Gene Promoter in the Muscular Dystrophic Transgenic dy/dy Mouse
• Expression of the Myogenin-LacZ Reporter Gene During Early Postimplantation Development of the Mouse
• Quantitative Analysis of Coat-color Patterns in BALB/c ⇔ C57BL/6 Mouse Chimeras by Means of a Computer-Based Color Image Processor System
• Quantitative Analysis of Coat-color Patterns in BALB/c ⇔ C57BL/6 Mouse Chimeras by Means of a Computer-Based Color Image Processor System
• Expression of the Myogenin-LacZ Reporter Gene During Early Postimplantation Development of the Mouse
• Effect of Organic Acids in Copper Chemical Mechanical Planarization Slurry on Slurry Stability and Particle Contamination on Copper Surfaces
• Passivation and Etching of Wafer Surfaces in HF-H_2O_2-WA Solutions
• Fluoroscopically Assisted Percutaneous Translaminar Facet Screw Fixation Following Anterior Lumbar Interbody Fusion : Technical Report
• The Hydrophilization of Process Wafers in Dilute Hydrogen Peroxide Solutions and Ozonated Deionized Water and Its Effects on Defects and Gate Oxide Integrity
• Enhanced fluorescence by controlled surface roughness of plastic biochip (Special issue: Microprocesses and nanotechnology)
• Effect of Rinse Process on Removal of Crown Type Defects during Photoresist Development
• Risk Factor for Unsatisfactory Outcome After Lumbar Foraminal and Far Lateral Microdecompression
• Effect of Anthropometric Features on the Severity of Lumbar Disk Herniation
• Extraforaminal Lumbar Synovial Cyst Causing Sudden Foot Drop
• Risk Factors for Perioperative Cardiac Complications After Lumbar Fusion Surgery
• The relationship between circulating fibroblast growth factor 23 and bone metabolism factors in Korean hemodialysis patients
• Adjacent Segment Disease After Interbody Fusion and Pedicle Screw Fixations for Isolated L4-L5 Spondylolisthesis : A Minimum Five-Year Follow-up
• Comparison of Multifidus Muscle Atrophy and Trunk Extension Muscle Strength : Percutaneous Versus Open Pedicle Screw Fixation
• A Study on the Planning Method of Temporary Residences for Refugees Following a Disaster : Focused on Korean Temporary Residences(Architectural/Urban Planning and Design)
• Preventive effect of Fluoride-containing Adhesive film made by Nano technology on dental caries
• Delayed Neurological Insufficiency Caused by Transverse Sacral Fracture After Minor Trauma in Elderly Patients : Two Case Reports
• Thoracic Disk Herniation Manifesting as Sciatica-Like Pain : Two Case Reports
• Damage Free Particle Removal from Extreme Ultraviolet Lithography Mask Layers by High Energy Laser Shock Wave Cleaning
• Learning Curve for Percutaneous Endoscopic Lumbar Discectomy
• Effect of Alkaline pH on Polishing and Etching of Single and Polycrystalline Silicon
• Intradural Invasion of Lumbar Synovial Cyst : Case Report
• Reaction of Ozone and H2O2 in NH4OH Solutions and Their Reaction with Silicon Wafers
• The Effect of Hydrogen Peroxide on Frictional and Thermal Behaviors in a Citric Acid-Based Copper Chemical Mechanical Planarization Slurry
• A CGE ANALYSIS OF THE ASEAN+3 FREE TRADE AGREEMENT UNDER DIFFERENT MARKET STRUCTURES
• Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask
• Fabrication of Large-Area CoNi Mold for Nanoimprint Lithography
• Delayed Neurological Deficits Induced by an Epidural Hematoma Associated With a Thoracic Osteoporotic Compression Fracture
• Fabrication of Stainless Steel Mold Using Electrochemical Fabrication Method for Microfluidic Biochip
• Physical and Chemical Characterization of Reused Oxide Chemical Mechanical Planarization Slurry
• Hybrid Cleaning Technology for Enhanced Post-Cu/Low-Dielectric Constant Chemical Mechanical Planarization Cleaning Performance
• Effect of Corrosion Inhibitor, Benzotriazole, in Cu Slurry on Cu Polishing
• The Hydrophilization of Process Wafers in Dilute Hydrogen Peroxide Solutions and Ozonated Deionized Water and Its Effects on Defects and Gate Oxide Integrity
• The Efficacy of Hydroxyapatite for Screw Augmentation in Osteoporotic Patients
• Hybrid Cleaning Technology for Enhanced Post-Cu/Low-Dielectric Constant Chemical Mechanical Planarization Cleaning Performance (Special Issue : Advanced Metallization for ULSI Applications)
• P-19 Thermal Environment Analysis of a Classroom by CFD Simulation to Determine Optimal Temperature Sensor Position in Ceiling Type Air-Conditioning System
• Factors Affecting Clinical Outcomes in Treating Patients With Grade 1 Degenerative Spondylolisthesis Using Interspinous Soft Stabilization With a Tension Band System : A Minimum 5-year Follow-up
• Radiation Exposure to the Surgeon During Percutaneous Endoscopic Lumbar Discectomy : A Prospective Study

もっと見る 閉じる

スポンサーリンク