Effect of Alkaline pH on Polishing and Etching of Single and Polycrystalline Silicon

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概要

• 論文の詳細を見る

著者

• Prasad Y.

  Department Of Pharmacokinetics Kyoto Pharmaceutical University

• Kang Young-Jae

  Department of Materials Engineering, Hanyang University, Ansan 426-791, Korea

• Park Jin-Goo

  Department of Bio-Nano Technology and Micro Biochip Center, Hanyang University, Ansan 426-791, Korea

• Kwon Tae-Young

  Department of Materials Engineering, Ansan, Gyeonggi 426-791, Korea

• Venkatesh R.

  Department of Materials Engineering, Hanyang University, Ansan, Gyeonggi 426-791, Republic of Korea

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