Reaction of Ozone and H_2O_2 in NH_4OH Solutions and Their Reaction with Silicon Wafers

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-06-15

著者

• Park Jin-goo

  Department Of Metallurgy And Materials Engineering Micro Biochip Center Hanyang University

• Park Jin-goo

  Department Of Metallurgy And Materials Engineering Center For Electronic Materials And Components Ha

• Eom Dae-hong

  Department Of Metallurgy And Materials Engineering Center For Electronic Materials And Components Ha

• BUSNAINA Ahmed

  Center for Microcontamination Control, Northeastern University

• Busnaina Ahmed

  Center For Microcontamination Control Northeastern University

• LIM Geun-Bae

  Pohang University of Science and Technology, Department of Mechanical Engineering

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