Effect of Calcination Process on Synthesis of Ceria Particles, and Its Influence on Shallow Trench Isolation Chemical Mechanical Planarization Performance
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概要
- 論文の詳細を見る
The effect of the calcination process for cerium carbonate, a precursor of ceria, on the degree of synthesis and colloidal properties of ceria particles in aqueous media, which greatly influence shallow trench isolation (STI) chemical mechanical planarization (CMP) performance, was investigated. A two-step calcination process, consisting of decarbonation and crystal growth, resulted in a higher degree of synthesis for the same crystal size, a narrower particle size distribution, and better dispersion of the ceria particles, than conventional one-step calcination. These properties enhanced certain aspects of STI CMP performance, leading to a higher oxide removal rate, a better selectivity between oxide and nitride, and fewer defects, including remaining particles.
- 2006-06-15
著者
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Paik Ungyu
Department Of Ceramic Engineering Hanyang University
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Kim Sang-kyun
Department Of Ceramic Engineering Hanyang University
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KIM Dae-Hyeong
KCTech
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Kang Hyun-goo
Nano-soi Process Laboratory Hanyang University
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Park Jea-gun
Nano-soi Process Laboratory Department Of Electrical And Computer Engineering Hanyang University
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Kim Dae-Hyeong
KCTech, 271-14 Kyeruk-Ri, Miyang-Myon, Anseong-Si, Kyongki-Do, Korea
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