Effect of Discharge Gas Pressure on YBaCuO Epitaxial Film Formation by Reactive RF Magnetron Sputtering
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概要
- 論文の詳細を見る
The in situ epitaxial growth of the YBaCuO film was carried out by the reactive magnetron sputtering under discharging gas pressures ranging from 4-120 Pa. It appeared that the pressure strongly affected not only the deviation of the film composition from the target but also the film crystallinity which is in turn closely correlated to the superconductivity and its stability. In the plasma emission spectra, we found a reduction in the Ar spectrum intensities relative to those of the metal components with increasing pressure.
- 社団法人応用物理学会の論文
- 1990-04-20
著者
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KOBAYASHI Takeshi
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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IYORI Masahiro
Tsukuba Research Center, SANYO Electric Co., Ltd.
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Kobayashi Takeshi
Department Of Biological Chemistry College Of Bioscience And Biotechnology Chubu University
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SAKUTA Ken
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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Sakuta Ken
Graduate School Of Engineering Science Osaka University
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Iyori Masahiro
Tsukuba Research Center Sanyo Electric Co. Ltd.
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IYORI Masahiro
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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KATAYAMA Yoshitomo
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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Katayama Yoshitomo
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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