Selective Heteroepitaxial Growth of (100)-MgO/(001)-Y_1Ba_2Cu_3O_y on MgO Substrate and Its Superconductivity

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概要

• 論文の詳細を見る

• The selective Y_1Ba_2Cu_3O_y epitaxial growth and, as its advanced technology, MgO/Y_1Ba_2Cu_3O_y selective heteroepitaxy are demonstrated. The film growth was done by the pressure-controlled magnetron sputtering on the MgO substrate with partial SiO coating. The epitaxial Y_1Ba_2Cu_3O_y films were grown in the patterned shape through a SiO window, showing the critical temperature of 77 K. In the remaining wafer region where the film contacted the underlying SiO, significant Si and Ba interdiffusion was found, resulting in the amorphous and insulating Y-Ba-Cu-Si-O. In the same way, the selective heteroepitaxy was also successfully obtained.

• 社団法人応用物理学会の論文
• 1990-09-20

著者

• KOBAYASHI Takeshi

  Department of Electrical Engineering, Faculty of Engineering Science, Osaka University

• Kobayashi Takeshi

  Department Of Biological Chemistry College Of Bioscience And Biotechnology Chubu University

• HASHIGUCHI Seishiro

  Department of Electronics and Information Science, Kyoto Institute of Technology

• SAKUTA Ken

  Department of Electrical Engineering, Faculty of Engineering Science, Osaka University

• ASANO Kiyomitsu

  KEK, National Laboratory for High Energy Physics

• Sakuta Ken

  Graduate School Of Engineering Science Osaka University

• AWAJI Takahiro

  Department of Electrical Engineering, Faculty of Engineering Science, Osaka University

• Awaji Takahiro

  Department Of Electrical Engineering Faculty Of Engineering Science Osaka University

• Asano K

  Kek National Laboratory For High Energy Physics

• HASHIGUCHI Shoichi

  Central Research Laboratory, Sumitomo Cement Ltd.

• ASANO Katsunori

  Department of Electrical Engineering, Faculty of Engineering Science, Osaka University

• Hashiguchi S

  Kyoto Inst. Technol. Kyoto Jpn

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