Study of Submicron SrTiO_3 Patterning

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-01-30

著者

• Aoki Hiroaki

  Department Of Organic And Polymeric Materials Tokyo Institute Of Technology

• AOKI Hidemitsu

  Microelectronics Research Labs., NEC Corp.

• IKAWA Eiji

  Microelectronics Research Labs., NEC Corp.

• KIKKAWA Takamaro

  Microelectronics Research Labs., NEC Corp.

• HASHIMOTO Toshiki

  Microelectronics Research Labs, NEC Corp.

• YAMAMICHI Shintaro

  Functional Materials Research Laboratories, NEC Corporation

• YAMAMICHI Shintaro

  Fundamental Research Laboratories, NEC Corporation

• SAKUMA Toshiyuki

  Fundamental Research Laboratories, NEC Corporation

• MIYASAKA Yoichi

  Fundamental Research Laboratories, NEC Corporation

• HASHIMOTO Tatsunori

  Department of Electronics, Kyushu University

• Kikkawa Takamaro

  Microelectronics Research Laboratories Nec Corporation

• Yamamichi Shintaro

  Functional Materials Research Laboratories Nec Corporation

• Yamamichi Shintaro

  Fundamental Research Laboratories Nec Corporation

• Hashimoto T

  Department Of Chemistry For Materials Faculty Of Engineering Mie University

• Aoki H

  Tokyo Inst. Technol. Tokyo Jpn

• TAKEUCHI Kiyoshi

  Microelectronics Research Laboratories, NEC Corporation

• Ikawa E

  Ulsi Device Development Labs. Nec Corporation

• Ikawa Eiji

  Microelectronics Research Laboratories Nec Corporation

• Tokashiki K

  Nec Corp. Kanagawa Jpn

• Hashimoto Tadanori

  Department Of Chemistry For Materials Faculty Of Engineering Mie University

• TAKEMURA Koichi

  Fundamental Research Laboratories, NEC Corporation

• Sakuma T

  Fundamental Research Laboratories Nec Corporation

• Sakuma Toshiyuki

  Fundamental Research Laboratories Nec Corporation

• Takemura K

  Fundamental Research Laboratories Nec Corporation

• Miyasaka Y

  Fundamental Research Laboratories Nec Corporation

• Miyasaka Yoichi

  Fundamental Research Laboratories Nec Corporation

• Takeuchi Kiyoshi

  Microelectronics Res. Labs. Nec Corporation

• AOKI Hidemitsu

  Microelectronics Research Laboratories, NEC Corporation

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