Fatigue Characteristics of Sol-Gel Derived Pb(Zr, Ti)O_3 Thin Films (<Special Issue> FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
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概要
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Fatigue mechanisms of sol-gel derived Pb(Zr-Ti)O_3 (PZT) thin films and the effects of La addition on the fatigue characteristics were investigated. For PZT(40/60) and PZT(53/47), the remanent polarization (P_r) and the coercive field (E_c) decreased with switching cycles. These properties were restored by heating the fatigued films above their Curie temperature. This result indicates that domain pinning is the dominant fatigue mechanism for PZT(40/60) and PZT(53/47). On the other hand, for PZT(70/30), P_r was almost constant and E_c increased with switching cycles; this implies that the fatigue mechanism for PZT(70/30) is different from that for PZT(40/60) and PZT(53/47). Addition of La to the PZT(53/47) film reduced space charge in the film, though did not improve fatigue characteristics.
- 社団法人応用物理学会の論文
- 1994-09-30
著者
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MIYASAKA Yoichi
Fundamental Research Laboratories, NEC Corporation
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Amanuma K
Silicon Systems Research Laboratories Nec Corporation
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HASE Takashi
Fundamental Research Laboratories, NEC Corporation
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AMANUMA Kazushi
Fundamental Research Laboratories, NEC Corporation
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Hase T
Nec Corp. Kawasaki Jpn
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Hase Takashi
Fundamental Research Laboratories Nec Corporation
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Miyasaka Y
Fundamental Research Laboratories Nec Corporation
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Miyasaka Yoichi
Fundamental Research Laboratories Nec Corporation
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