Pb(Zr, Ti)O_3 Thin-Film Preparation by Multitarget Magnetron Sputtering

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-09-30

著者

• Hirata K

  Kyushu Inst. Technology Kitakyushu

• Hirata Kazuo

  Anelva Co.ltd.

• HOSOKAWA Naokichi

  ANELVA CORPORATION

• SAKUMA Toshiyuki

  Fundamental Research Laboratories, NEC Corporation

• MIYASAKA Yoichi

  Fundamental Research Laboratories, NEC Corporation

• HASE Takashi

  Fundamental Research Laboratories, NEC Corporation

• Sakuma T

  Fundamental Research Laboratories Nec Corporation

• Sakuma Toshiyuki

  Fundamental Research Laboratories Nec Corporation

• Hase T

  Nec Corp. Kawasaki Jpn

• Hase Takashi

  Fundamental Research Laboratories Nec Corporation

• Hosokawa N

  Anelva Corp. Tokyo Jpn

• Miyasaka Y

  Fundamental Research Laboratories Nec Corporation

• Miyasaka Yoichi

  Fundamental Research Laboratories Nec Corporation

関連論文

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• Structural and Electrical Characterization of SrTiO_3 Thin Films Prepared by Metal Organic Chemical Vapor Deposition
• Sputter Synthesis of Ba_2YCu_3O_y As-Deposited Superconducting Thin Films from Stoichiometric Target---A Mechanism of Compositional Deviation and Its Control : Electrical Properties of Condensed Matter
• Study of Submicron SrTiO_3 Patterning
• Filling of Sub-μm Through-holes by Self-sputter Deposition
• Effect of Reducing Process Temperature for Preparing SrBi_2Ta_20_9 in a Metal/Ferroelectric/ Semiconductor Structure
• Preparation of Pb(Zr, Ti)O_3 Thin Films by Multitarget Sputtering ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
• Preparation of Pb(Zr,Ti)O_3 Thin Films by Multi-Target Sputtering
• Pb(Zr, Ti)O_3 Thin-Film Preparation by Multitarget Magnetron Sputtering
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• Ferroelectric Pb(Zr, Ti)O_3 Thin Films Prepared by Metal Target Sputtering : T: Thin Film
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• Ferroelectric Properties of Sol-Get Derived Pb(Zr,Ti)O_3 Thin Films
• Relationship between Energetic Neutrals and Impurities in Sputtered Films
• Reactive Coevaporation Synthesis and Characterization of SrTiO_3 Thin Films : Thin Films
• Analysis of the Dependence of Ferroelectric Properties of Strontium Bismuth Tantalate (SBT) Thin Films on the Composition and Process Temperature
• High Dielectric Constant (Ba, Sr)TiO_3 Thin Films for ULSI DRAM Application
• Downstream Gas Temperature Variation of Glow and Plasmoidal Oxygen Radio Frequency Discharges
• Imprint Characteristics of SrBi2Ta2O9 Thin Films with Modified Sr Composition

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