Downstream Gas Temperature Variation of Glow and Plasmoidal Oxygen Radio Frequency Discharges

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概要

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• The downstream gas temperature variation of radio frequency (13.56 MHz) electrodeless discharges is measured as a function of power, gas flow rate and pressure. The gas temperature is seen to increase linearly with power but shows a drastic drop at the point where glow discharge plasma shifts to the plasmoid state. The drop in temperature is assumed to be due to the dissipation of energy which leaves the localized plasmoid. The variation of gas temperature is found to follow a relationship similar to that of the gas residence time in the discharge region with changing flow rate and pressure.

• 社団法人応用物理学会の論文
• 1992-06-01

著者

• HOSOKAWA Naokichi

  ANELVA CORPORATION

• Wickramanayaka Sunil

  Graduate School of Electronic Science and Technology, Shizuoka University

• Hatanaka Yoshinori

  Graduate School Electronic Science And Technology:research Institute Of Electronics Shizuoka Univers

• HATANAKA Yoshinori

  Graduate School of Electronics and Technology, Research Institute of Electronics, Shizuoka University

• JIMBA Hitoshi

  ANELVA Corporation

• WICKRAMANAYAKA Sunil

  Graduate School of Electronics and Technology, Research Institute of Electronics, Shizuoka University

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