Variation of the Recombination Coefficient of Atomic Oxygen on Pyrex Glass with Applied RF Power
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概要
- 論文の詳細を見る
The wall recombination coefficient (γ) of atomic oxygen on a pyrex surface and O(^1D) concentration in the downstream flow were measured in a radio-frequency (13.56 MHz) oxygen discharge in the applied power region of 200 W-2500 W. The NO_2 continuum intensity was used to monitor the atomic oxygen. The γ varies from 1.1×10^<-4> to 6.1×10^<-5> having a minimum value of 5.1×10^<-5> at 700 W, at which point the glow discharge plasma changes to an arclike plasma. The mechanism of the transition of glow discharge plasma to arclike plasma and possible reasons for the inconstant γ are discussed in light of electron density, O(^1D) concentration in the downstream flow, and the gas temperature.
- 社団法人応用物理学会の論文
- 1991-11-15
著者
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Wickramanayaka Sunil
Graduate School of Electronic Science and Technology, Shizuoka University
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Hatanaka Yoshinori
Graduate School Electronic Science And Technology:research Institute Of Electronics Shizuoka Univers
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Hatanaka Yoshinori
Graduate School Of Science And Technology Shizuoka University
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Wickramanayaka Sunil
Graduate School Of Science And Technology Shizuoka University
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HOSOKAWA Naokithi
Anelva Corporation
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