The Role of Hydrogen Atoms in Afterglow Deposition of Silicon Thin Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-11-20

著者

• NAKANISHI Yoichiro

  Graduate School of Electronic Science and Technology, Shizuoka University

• HATANAKA Yoshinori

  Graduate School of Electronic Science and Technology, Shizuoka University

• Nakanishi Yoichiro

  Graduate School Of Electronic Science And Technology Shizuoka University

• Hatanaka Y

  Research Institute Of Electronics Shizuoka University

• Hatanaka Yoshinori

  Research Institute Of Electronics Shizuoka University:graduate School Of Electric Science And Techno

• Meikle S

  Research Institute Of Electronics Shizuoka University:(present Address) Micron Technology

• Meikle Scott

  Graduate School of Electronic Science and Technology, Shizuoka University

• Hatanaka Yoshinori

  Graduate School Electronic Science And Technology:research Institute Of Electronics Shizuoka Univers

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