Variation of Stress and Hardness of a-Sic:H Films with Film Composition

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概要

• 論文の詳細を見る
• 静岡大学の論文

著者

• Wickramanayaka Sunil

  静岡大 電子工研

• Wickramanayaka S

  Anelva Corporation

• Hatanaka Y

  Shizuoka Univ. Hamamatsu Jpn

• Hatanaka Y

  Research Institute Of Electronics

• Hatanaka Y

  Research Institute Of Electronics Shizuoka University

• Hatanaka Yoshinori

  Research Institute Of Electronics Shizuoka University:graduate School Of Electric Science And Techno

• Sunil Wickramanayaka

  静岡大学電子工学研究所

• Kitamura Ken

  Department Of Otolaryngology School Of Medicine Tokyo Medical And Dental University

• Wickramanayaka Sunil

  Anelva Corporation Head Office

• Hatanaka Y

  Graduate School Of Electronic Science And Technology Shizuoka University

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