Deposition of SiN_x Thin Film Using μ-SLAN Surface Wave Plasma Source
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-07-30
著者
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NAKANISHI Yoichiro
Graduate School of Electronic Science and Technology, Shizuoka University
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HATANAKA Yoshinori
Graduate School of Electronic Science and Technology, Shizuoka University
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Nakanishi Yoichiro
Graduate School Of Electronic Science And Technology Shizuoka University
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Xu Ying-yu
Graduate School Of Electronic Science And Technology Shizuoka University
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Korzec Dariusz
Wuppertal University Obere Lichtenplatzer
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Ogishima Takuya
Graduate School of Electronic Science and Technology, Shizuoka University
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Hatanaka Yoshinori
Graduate School Electronic Science And Technology:research Institute Of Electronics Shizuoka Univers
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Ogishima Takuya
Graduate School Of Electronic Science And Technology Shizuoka University
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