High-Vacuum Planar Magnetron Sputtering
スポンサーリンク
概要
- 論文の詳細を見る
High-vacuum planar magnetron sputtering is performed in a wide pressure range of 10^<-1> Pa to 10^<-3> Pa. The measured sputter-deposition rates of Al are 0.2 μm/min at a pressure of 0.12 Pa (discharge current 0.2 A) to 8.3 Å/min at 0.0025 Pa (1 mA). The deposition rate is proportional to the discharge current, and increases rapidly with the discharge voltage and the magnetic flux density. It is found that the optimum distance between the substrate (anode) and target surface gives the maximum deposition rate.
- 社団法人応用物理学会の論文
- 1993-02-15
著者
-
Ishibashi K
Sumitomo Electric Ind. Ltd. Hyogo Jpn
-
Nakamura Gen
Department Of Mathematics Josai University
-
Nakamura Gen
Department Of Electrical Engineering Science University Of Tokyo
-
HOSOKAWA Naokichi
ANELVA CORPORATION
-
MIURA Tatsuro
Department of Applied Physics, Graduate School of Engineering, Tohoku University
-
ASAMAKI Tatsuo
Department of Electrical Engineering, Science University of Tokyo
-
MIURA Tsutomu
Department of Electrical Engineering, Science University of Tokyo
-
Hotate Kohichi
Department Of Electrical Engineering Science University Of Tokyo
-
Miura T
Department Of Electrical & Electronic Engineering Yamaguchi University
-
Asamaki T
Tokyo Univ. Sci. Tokyo Jpn
-
Asamaki Tatsuo
Department Of Electrical Engineering Science University Of Tokyo
-
YONAIYAMA Shingo
Department of Electrical Engineering, Science University of Tokyo
-
ISHIBASHI Keiji
ANELVA Corporation
-
Miura Tsutomu
Department Of Electrical Engineeing Faculty Of Engineering Science University Of Tokyo
-
Yonaiyama Shingo
Department Of Electrical Engineering Science University Of Tokyo
-
Hosokawa N
Anelva Corp. Tokyo Jpn
-
Miura Tsutomu
Department Of Applied Bioscience Tokyo University Of Agriculture
関連論文
- インピーダンス同定を伴う心電図逆問題の数値計算(数値計算アルゴリズムの研究)
- Effects of Oxygen Partial Pressure and Substrate Temperature on Crystalline Orientation in Y-Ba-Cu-O Films Prepared by Sputtering
- Structural Features and Superconducting Properties of As-Grown Y-Ba-Cu-O Films
- Low Temperature Preparation of As-Sputtered Superconducting YBaCuO Thin Films by Magnetron Sputtering : Electrical Properties of Condensed Matter
- Preparation of YBa_2Cu_3O_y Superconducting Thin Films by Radio-Frequency Plasma Flash Evaporation
- Modulated Structure of Misfit-Layered Cobalt Oxide [Ca_2(Co_Cu_)_2O_4]_CoO_2
- Preparation and Low-Temperature Thermoelectric Properties of the Composite Crystal [Ca_2(Co_Cu_)_2O_4]_CoO_2 : Structure and Machanical and Thermal Properties of Condensed Matter
- Beating of the Shubnikov-de Haas Oscillations in GaAs/AlGaAs Quantum-Dot Arrays
- Modeling of Electron Transport in Corrugated Quantum Wires
- Ballistic Weak Localization and Wave Function Scarring in Quantum Wires
- Absorption Lines of O_2 and HF in KrF Laser Spectrum
- Determination of Molecular Constnts of the X^3Σ^-_g State of O_2
- Absorption Lines of Vibrationally Excited O_2 and HF in ArF Laser Spectrum
- Gas-Temperature-Controlled (GTC) CVD of Aluminum and Aluminum-Silicon Alloy Film for VLSI Processing : Techniques, Instrumentations and Measurement
- Epitaxial Growth of Al on Si by Gas-Temperature-Controlled Chemical Vapor Deposition : Techniques, Instrumentations and Measurement
- Is There a Magnetic-Field-Induced Breakdown in the Universality of Conductance Fluctuations?
- Phase Breaking of Coherent Electron Waves in Dot Array Systems ( Quantum Dot Structures)
- The Role of Electron Phase Coherence in Quantum Transport through Open Ballistic Cavities ( Quantum Dot Structures)
- Quantum Transport in Single and Multiple Quantum Dots ( Quantum Dot Structures)
- Carrier Transport in Nanodevices
- Trajectory Transition Due to Gate Depletion in Corrugation Gated Quantum Wires
- Carrier Transport in Nanoscale Structures
- Electron Wave Interference in Ballistic and Quasi-Ballistic Nanostructures
- Zero-Current Voltage Fluctuations in Quantum Dots at High Magnetic Fields
- Study of Scattering Processes in Quantum Wires by a Correlation Field Analysis of the Phase Coherent Interferences
- The Magnetic Field Dependent Characteristics of Conductance Fluctuations in Ballistic Quantum Dots
- Quantum Dots and Their Tunnel Barrier in Semiconducting Single-Wall Carbon Nanotubes with a p-Type Behavior
- Fabrication of a Single-Electron Inverter in Single-Wall Carbon Nanotubes
- Quantum dot transport of semiconducting single-wall carbon nanotubes
- 招待講演 Carbon nanotubes for quantum-dot devices
- 招待講演 Carbon nanotubes for quantum-dot devices
- Quantum Dot Formation in Single-Wall Carbon Nanotubes
- Quantum Dots in Carbon Nanotubes
- Characterization of Small Superconducting Rings and Its Possible Application to New Single Flux Quantum Devices
- 3次元リーマン多様体の$\mathbb{R}^6$への局所等長埋入問題(リーマン幾何学の解析的手法による研究)
- Transition from Semi-Classical to Quantum Transport in Quasi-Ballistic Wires
- Filling of Sub-μm Through-holes by Self-sputter Deposition
- Copper Self-Sputtering by Planar Magnetron
- Effects of Substrates on Formation of Metastable Bi_2Sr_Cu_nO_y Thin Films
- Suppression of Lipid-Hydroperoxide and DNA-Adduct Formation by Isoflavone-Containing Soy Hypocotyl Tea in Rats
- 積分方程式のかたち (特集/方程式のかたち)
- 師を語る 数学を通して出会った私の恩師達
- Electric Properties of the Y-Ba-Cu-O/Ag Interface : Electrical Properties Condensed Matter
- 弾性体の逆問題の数学解析 (総特集 地球物理学と数学との連携--逆問題の観点から)
- 弾性体の逆問題
- S. Saitoh, "Integral Transforms, Reproducing Kernels and Their Applications" Pitman Research Notes, Longman, New York, 1997
- 残留応力とラーメ係数の同定
- 境界値逆問題 : Calderonからの15年
- A global identifiability theorem for the Schrodinger equation in a magnetic field(Spectral and Scattering Theory and Its Related Topics)
- Preparation of Pb(Zr, Ti)O_3 Thin Films by Multitarget Sputtering ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Preparation of Pb(Zr,Ti)O_3 Thin Films by Multi-Target Sputtering
- Pb(Zr, Ti)O_3 Thin-Film Preparation by Multitarget Magnetron Sputtering
- Preparation of Epitaxial SrCuO_x Thin Films with an Infinite-Layer Structure
- Crystalline Orientation Control for Bi-Sr-Ca-Cu-O Thin Films Prepared on (110)SrTiO_3 by Coevaporation
- Preparation of Ca-Substituted Y-Ba-Cu-O "124" Phase Thin Films by Magnetron Sputtering and Their Thermal Stability
- Phase Control of Bi-Sr-Ca-Cu-O Thin Films Prepared by Coevaporation with RF Oxygen Plasma
- High-Vacuum Planar Magnetron Sputtering
- Determination of Sulfur Contamination on Molybdenum Surfaces
- Ba_2Y_1Cu_3O_ Oxidation by Thermodynamic Nonequilibrium High-Temperature (TNH) Plasma
- Remote Plasma SiO_2 Deposition by Tetraethoxysilane with Chemically and Energetically Different Atomic Species
- Superiority of O(^1D) atom for solid and gas phase reactions over O(^3P) atom
- Properties of Atomic Oxygen obtained from Thermodynamically Non-equilibrium High Temperature Plasma
- Uniqueness in Inverse Problems for the Isotropic Lamé System
- Development of a Fast-Cycle, Extremely High-Vacuum System Using Cryopump
- Ballistic Electron Emission Microscopy Studies of Inhomogeneity in Au/CaF_2/n-Si(111) Interfaces
- Scanning Tunneling Microscopy Study of Initial Growth of CaF_2 and BaF_2 on Si(111)
- Nucleation and Growth Morphology in Heteroepitaxy of CaF_2 on Si(111) : a Study with Scanning Tunneling Microscopy
- 木のk段以内平面描画法(数理モデルの解析における組合せ論的様相)
- PC83 SARKOMYCIN ANALOGUES AS HIGHLY ACTIVE ANTIMUTAGENS AGAINST UV-INDUCED MUTATION IN Escherichia coli
- Possible Interaction of Thiol Groups of Proteins with Antimutagens Containing a Conjugated Carbonyl Structure(Organic Chemistry)
- Direct Measurement of Potential Distribution in Planar Magnetron Discharge by Probe Method
- Branching of Singularities for Degenerate Hyperbolic Operators
- Theory on High-Vacuum Planar Magnetron Discharge Incorporating the Effect of Escaping Electrons
- Axial Structure of High-Vacuum Planar Magnetron Discharge Space
- Theory on High-Vacuum Planar Magnetron Discharge
- Transcatheter coil closure of a coronary artery fistula in a 2-year-old child
- Relationship between Energetic Neutrals and Impurities in Sputtered Films
- Whispering Gallery Waves in a Neighborhood of a Higher Order Zero of the Curvature of the Boundary
- 弾性体の境界値逆問題に対する大域的一意性(スペクトル散乱理論とその周辺)
- 有限要素法による非均一2次元弾性定数逆問題の非決定性について(最適化理論と数理構造)
- 境界上の材料特性逆問題(微分方程式とスペクトル・散乱理論)
- 書評 V.Isakov: Inverse Problems for Partial Differential Equations〔和文〕
- 逆問題の面白さ (特集 逆問題の発想)
- Large-Scale Coaxial Magnetron Discharge Containing Magnets at Extremely High Vacuum and Its Application to Sputter Ion Pump
- Microlocal Properties of Local Elementary Solutions for Cauchy Problems for a Class of Hyperbolic Linear Differential Operators
- A Hot Cathode Magnetron Gauge using a Divergence-Type Magnetic Field for Electric Field Control
- Optimization of Cement Manufacturing Process
- Optimizing Control System for Grinding Process
- A Numerical Method for the Electrocardiography with Conductivity Identification
- Copper Filling of Deep Sub-μm Through-Holes by High-Vacuum Planar Magnetron Sputtering Using Argon Gas with Added Nitrogen: Optimum Quantity of Nitrogen in Argon Gas
- Downstream Gas Temperature Variation of Glow and Plasmoidal Oxygen Radio Frequency Discharges
- Excitation System for Magnetic Resonance Elastography Using Micro MRI