Reactive Coevaporation Synthesis and Characterization of SrTiO_3 Thin Films : Thin Films
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概要
- 論文の詳細を見る
SrTiO_3 thin films were prepared by the reactive coevaporation method, where the Ti and Sr metals were evaporated in oxygen ambient with an E-gun and K-cell, respectively. A uniform depth profile in composition was achieved by altering the Ti evaporation rate according to the Sr evaporation rate change. A typical dielectric constant of 170 was measured on films of 75 nm in thickness. The in-situ annealing in oxygen plasma reduced the leakage current.
- 社団法人応用物理学会の論文
- 1991-09-30
著者
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MIYASAKA Yoichi
Fundamental Research Laboratories, NEC Corporation
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MATSUBARA Shogo
Fundamental Res. Labs. and VLSI Development Div., NEC Corporation
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Yamaguchi Hiromu
Fundamental Research Laboratories Nec Corporation
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Matsubara Shogo
Fundamental Research Laboratories Nec Corporation
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Matsubara Shogo
Fundamental Res. Labs. And Vlsi Development Div. Nec Corporation
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Miyasaka Yoichi
Fundamental Research Laboratories Nec Corporation
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