ZnO/SiO_2/Si Diaphragm Bulk Acoustic Wave Composite Resonators : Ultrasonic Transduction
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1984-09-20
著者
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MIYASAKA Yoichi
Fundamental Research Laboratories, NEC Corporation
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Hoshino Shigeki
Fundamental Research Laboratories Nec Corporation
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TAKAHASHI Sadayuki
Fundamental Research Laboratories, NEC Corporation
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Miyasaka Yoichi
Fundamental Research Laboratories Nec Corporation
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Takahashi Sadayuki
Fundamental Res. Labs. Nec Corporation
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Takahashi Sadayuki
Fundamental Research Laboratories Nec Corporation
関連論文
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- SrTiO_3 Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties : Thin Films
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