Influence of Halogen Plasma Atmosphere on SiO_2 Etching Characteristics

スポンサーリンク

概要

著者

関連論文

Compact Electron Cyclotron Resonance Plasma-Etching Reactor Employing Permanent Magnet : Etching
Compact Electron Cyclotron Resonance Plasma-Etching Reactor Employing Permanent Magnet
Si Etching with Low Ion Energy in Low-Pressure Electron Cyclotron Resonance Plasma Generated by Longitudinal and Multipole Magnetic Fields
High Etch Rate Modes in Microwave Plasma Etching of Silicon in High Magnetic Fields : Etching and Deposition Technology
High Etch Rate Modes in Microwave Plasma Etching of Silicon in High Magnetic Fields
Dependence of Residual Chlorine Amount on Al Grain Size
Influence of Halogen plasma Atmosphere on SiO_2 Etching Characteristics : Etching
Influence of Halogen Plasma Atmosphere on SiO_2 Etching Characteristics
After-Corrosion Suppression Using Low-Temperature Al-Si-Cu Etching
STUDY OF HIGH TEMPERATURE EFFECTS AND CONSTRUCTION OF MOLECULAR MARKERS ON REPRODUCTIVEGROWTHIN BARLEYPLANT
Thermodynamic Estimation of Oxidation Ability of Various Gases Used for the Preparation of Superconducting Films at High Vacuum
Superconductivity in a New Oxide System of Eu-La-Ce-Cu-O
Preparation of a Bi-Sr-Ca-Cu-O High-T_c Superconductor by the Reaction of a Cu-Free Precursor with Cu Plate
Red-to-Yellow Electroluminescence from CdSe Microcrystal-Doped Indium Tin Oxide Thin Films
Second-Harmonic Generation from Thermally Poled Mixed Alkali Silicate Glasses Containing Various Alkaline-Earth Oxides
Second-Order Optical Nonlinearity in Electrically Poled Silicate Glass Containing Ga_2O_3
Second Harmonic Generation from Surface Crystallized Li_2O-Ta_2O_5-SiO_2 Glass
Effects of Kinetic Inductance on the Performance of a Flux-Flow-Type Josephson Amplifier
Effects of High Temperature on the Development of Pollen Mother Cells and Microspores in Barley Hordeum vulgare L.
Study of Submicron SrTiO_3 Patterning
Quarter-Micron Interconnection Technologies for 256-Mbit Dynamic Random Access Memories
Low-Temperature Etching of 0.2 μm Al Patterns Using a Sio_2 Mask
Reduction of Beam Divergence Angle by Low-Refractive-Index Layers Introduced to Real-Refractive-Index-Guided GaAlAs High-Power Laser Diodes
120 mW High-Power Low-Noise GaAlAs Multiple-Quantum-Well Laser Diodes with a New Real Refractive Index Guided Self-Aligned Structure
Specific Heat of a Regenerator Material Er_3Ni
Magnetic Field Influence on Er_3Ni Specific Heat
Specific Heat of ErNi in Magnetic Fields and Its Performance as Regenerator Material in Gifford-McMahon Refrigerator at Cryogenic Temperatures
Stress-induced second harmonic generation in silica glass
Luminescent properties of amorphous Al_2O_3 prepared by sol-gel method
Second Harmonic Generation of Thermally Poled ZnCl_2-B_2O_3-TeO_2 Glasses and Its Mechanism
Second Harmonic Generation from YAl_3(BO_3)_4-Containing Glass-Ceramics Prepared by Thermal Poling of Y_2O_3-Al_2O_3-B_2O_3 Glasses
Reduction of Threading Dislocations in GaN on Sapphire by Buffer Layer Annealing in Low-Pressure Metalorganic Chemical Vapor Deposition
A Capacitor over Bit-Line (COB) Stacked Capacitor Cell Using Local Interconnect Layer for 64 MbDRAMs
0.15μm CMOS Devices with Reduced Junction Capacitance
RuO_2/TiN-Based Storage Electrodes for (Ba, Sr)TiO_3 Dynamic Random Access Memory Capacitors
SrTiO_3 Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties : Thin Films
Number of Pollen Grains in Rice Cultivars with Different Cool-Weather Resistance at the Young Microspore Stage
Secondary Ion Analysis of Silicon under Ar^+ Ion Etching in Chlorine and Fluorine Flux
Single 1.5V Operation Power Amplifier MMIC with SrTiO_3 Capacitors for 2.4GHz Wireless Applications(Special Issue on Microwave and Millimeter-Wave Module Technology)
SrTiO_3 Capacitor with Relative Dielectric Constant of 200 on GaAs Substrate at Microwave Frequency
Novel Method for Generating Large Mesopores in an Amorphous Silica-Alumina by Controlling the Pore Size with the Gel Skeletal Reinforcement and Its Catalytic Cracking Properties as a Catalyst Matrix
Synchrotron Radiation Induced Direct Projection Patterning of Aluminum on Si and SiO_2 Surfaces (Special Issue on Opto-Electronics and LSI)
Second Harmonic Generation of Thermally Poled ZnCl2–B2O3–TeO2 Glasses and Its Mechanism
Second Harmonic Generation from YAl3(BO3)4-Containing Glass-Ceramics Prepared by Thermal Poling of Y2O3–Al2O3–B2O3 Glasses
The Influence of Matrix on Quantum Size Confinement of Semiconductor Microcrystals Doped in Glass Thin Films Prepared by RF-Sputtering

もっと見る

スポンサーリンク