Fabrication of Anodic Oxidation Films on 4H-SiC at Room Temperature Using HNO_3-Based Electrolytes
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-06-15
著者
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畑山 智亮
Graduate School Of Materials Science Nara Institute Of Science And Technology
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YANO Hiroshi
Graduate School of Materials Science, Nara Institute of Science and Technology
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HATAYAMA Tomoaki
Graduate School of Materials Science, Nara Institute of Science and Technology
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URAOKA Yukiharu
Graduate School of Materials Science, Nara Institute of Science and Technology
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FUYUKI Takashi
Graduate School of Materials Science, Nara Institute of Science and Technology
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Yano H
Graduate School Of Materials Science Nara Institute Of Science And Technology
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MIKAMI Hidenori
Graduate School of Materials Science, Nara Institute of Science and Technology
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