Determination of Etch Rate Behavior of 4H–SiC Using Chlorine Trifluoride Gas
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概要
- 論文の詳細を見る
The etch rate of single-crystalline 4H–SiC is studied using chlorine trifluoride gas at 673–973 K and atmospheric pressure in a cold wall horizontal reactor. The 4H–SiC etch rate can be higher than 10 μm/min at substrate temperatures higher than 723 K. The etch rate increases with the chlorine trifluoride gas flow rate. The etch rate is calculated by taking into account the transport phenomena in the reactor including the chemical reaction at the substrate surface. The flat etch rate at the higher substrate temperatures is caused mainly by the relationship between the transport rate and the surface chemical reaction rate of chlorine trifluoride gas.
- 2007-12-15
著者
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Oda Satoko
Department Of Anatomy Toho University School Of Medicine
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Miura Yutaka
Department Of Agricultural Chemistry Faculty Of Agriculture The University Of Tokyo
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Habuka Hitoshi
Department Of Chemical Engineering Science Yokohama National University
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Okumura Hajime
Power Electronics Research Center National Institute Of Advanced Industrial Science And Technology
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Arai Kazuo
Power Electronics Research Center National Institute Of Advanced Industrial Science And Technology (
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Fukae Katsuya
New Products Development Division, Kanto Denka Kogyo Co., Ltd., 1-2-1 Marunouchi, Chiyoda, Tokyo 100-0005, Japan
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Okumura Hajime
Power Electronics Research Center, National Institute of Advanced Science and Technology, AIST Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Katsumi Yusuke
Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
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Fukai Yasushi
New Products Development Division, Kanto Denka Kogyo Co., Ltd., 1-2-1 Marunouchi, Chiyoda, Tokyo 100-0005, Japan
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Kato Tomohisa
Power Electronics Research Center, National Institute of Advanced Science and Technology, AIST Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Habuka Hitoshi
Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
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