Time-Dependent Airborne Organic Contamination on Silicon Wafer Surface Stored in a Plastic Box
スポンサーリンク
概要
- 論文の詳細を見る
The time-dependent airborne organic contamination on a silicon wafer surface in a wafer storage box is studied using a model of the multicomponent organic species adsorption-induced contamination (MOSAIC) linked with the experiment. Both the adsorption rate and the desorption rate of the organic species in the wafer storage box were found to be much lower than those in the clean room air; this result is considered to be consistent with the very small concentrations and the very small transport rates of the organic species in the gas phase in the wafer storage box. The organic contamination in the wafer storage box follows the MOSAIC model similar to that in the clean room air.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-04-15
著者
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Shimada Manabu
Department Of Chemical Engineering Faculty Of Engineering Hiroshima University
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SUGIMOTO Fumitoshi
Fujitsu Laboratories Ltd.
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Okuyama Kikuo
Department Of Chemical Engineering Faculty Of Engineering Hiroshima University
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Shimazaki Yohei
Department Of Bioscience And Biotechnology Division Of Bioresource And Bioenvironmental Sciences Kyu
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Habuka Hitoshi
Department Of Chemical Engineering Science Yokohama National University
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Aihara Masahiko
Department Of Chemical Engineering Science Yokohama National University
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Okamura Shigeru
Fujitsu Laboratories Limited
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Takeuchi Takashi
Department Of Chemical Engineering Science Yokohama National University
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Aihara Masahiko
Department of Chemical Engineering Science, Yokohama National University, Tokiwadai, Hodogaya, Yokohama, Kanagawa 240-8501, Japan
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Okamura Shigeru
Fujitsu Laboratories Limited, 10-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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Shimada Manabu
Department of Chemical Engineering, Hiroshima University, Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8527, Japan
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Shimazaki Yohei
Department of Chemical Engineering Science, Yokohama National University, Tokiwadai, Hodogaya, Yokohama, Kanagawa 240-8501, Japan
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Habuka Hitoshi
Department of Chemical Engineering Science, Yokohama National University, Tokiwadai, Hodogaya, Yokohama, Kanagawa 240-8501, Japan
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Habuka Hitoshi
Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
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Sugimoto Fumitoshi
Fujitsu Laboratories Limited, 10-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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