Flatness Deterioration of Silicon Epitaxial Film Formed in a Horizontal Single-Wafer Epitaxial Reactor II

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-09-15

著者

• TAKEUCHI Takashi

  Department of Pediatrics, Wakayama Medical University

• AIHARA Masahiko

  Department of Material Science & Chemical Engineering, Yokohama National University

• HABUKA Hitoshi

  Department of Chemical Engineering Science, Yokohama National University

• Takeuchi T

  Department Of Chemical Engineering Science Yokohama National University

• FUKAYA Shinichi

  Department of Chemical Engineering Science, Yokohama National University

• SAWADA Aya

  Department of Chemical Engineering Science, Yokohama National University

• Sawada Aya

  Department Of Chemical Engineering Science Yokohama National University

• Habuka H

  Department Of Chemical Engineering Science Yokohama National University

• Habuka Hitoshi

  Department Of Chemical Engineering Science Yokohama National University

• Fukaya Shinichi

  Department Of Chemical Engineering Science Yokohama National University

• Aihara M

  Department Of Chemical Engineering Science Yokohama National University

• Aihara Masahiko

  Department Of Chemical Engineering Science Yokohama National University

• Takeuchi Takashi

  Department Of Chemical Engineering Science Yokohama National University

• Habuka Hitoshi

  Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan

• TAKEUCHI Takashi

  Department of Chemical Engineering Science, Yokohama National University

関連論文

• Conversion from Total Cavopulmonary Shunt to Fontan Circulation : Improved Cyanosis with an 11-Year Interval
• Liposomalization of Lactoferrin Enhanced It's Anti-inflammatory Effects via Oral Administration(Biopharmacy)
• Electronic Structure Characteristics of MBE (molecular beam epitaxy)-Grown Diluted Magnetic Semiconductor Ga_Cr_xN Films
• Cross-Layer Design for Low-Power Wireless Sensor Node Using Wave Clock
• A Sero-Survey of Subtype H3 Influenza A Virus Infection in Dogs and Cats in Japan
• Visual Evoked Potentials from Scalp in Dogs
• Initial Response Method for Simultaneous Determination of Both Diffusivity and Distribution Coefficients in Symmetric Reverse Osmosis Membrane by Dialysis
• Cross-Layer Design for Low-Power Wireless Sensor Node Using Wave Clock
• A Practical Design Method for a Rapid Thermal Processing System
• Nonempirical Design of Rapid Thermal Processing System : Instrumentation, Measurement, and Fabrication Technology
• Electronic Structures of Bi_4Ti_3O_ Thin Film and Single Crystal Determined by Resonant Soft-X-Ray Emission Spectroscopy
• Electronic Structure in the Bulk State of Protonic Conductor CaZrO_3 by Resonant Soft-X-Ray Emission Spectroscopy : Electrical Properties of Condensed Matter
• Primary Malignant Peripheral Nerve Sheath Tumor with Eosinophilic Cytoplasmic Globules Arising from the Greater Omentum in a Dog
• Silicon Carbide Etching Using Chlorine Trifluoride Gas
• Preparation and Properties of (Pb,La)TiO_3 Pyroelectrie Thin Films by RF-Magnetron Sputtering
• Serum levels of neutrophil activation cytokines in Kawasaki disease
• Influence of Chemical Composition of CoFeB on Tunneling Magnetoresistance and Microstructure in Polycrystalline CoFeB/MgO/CoFeB Magnetic Tunnel Junctions
• A 58-μW Single-Chip Sensor Node Processor with Communication Centric Design
• A power-variation model for sensor node and the impact against life time of wireless sensor networks
• Expression and phosphorylation of TOPK during spermatogenesis
• Decarbonation and Pore Structural Change of Ca-Solid Reactant for CaO/CO_2 Chemical Heat Pump
• Water Motion in a Water Curtain Head for Cleaning a Large Glass Plate
• Air Flow in Square Quartz Plate Spin Cleaner
• Flatness Deterioration of Silicon Epitaxial Film Formed in a Horizontal Single-Wafer Epitaxial Reactor II
• Electronic Structure of Bi_4Ti_3O_ Thin Film by Soft-X-Ray Emission Spectroscopy
• Electrical Conductivity of Low-Temperature-Deposited Al_Ga_N Interlayer
• Unidirectionally Textured CaBi_4Ti_4O_ Ceramics by the Reactive Templated Grain Growth with an Extrusion
• Theoretical Study of Orientation Dependence of Piezoelectric Effects in Wurtzite Strained GaInN/GaN Heterostructures and Quantum Wells
• Piezoelectric Properties of Bismuth Layer-Structured Ferroelectric Ceramics witha Preferred Orientation Processed by the Reactive Templated Grain Growth Method
• Piezoelectric Stark-like Ladder in GaN/GaInN/GaN Heterostructures
• Structural Properties of Al_In_xN Ternary Alloys on GaN Grown by Metalorganic Vapor Phase Epitaxy
• GaN Based Laser Diode with Focused Ion Beam Etched Mirrors
• Reduction of Etch Pit Density in Organometallic Vapor Phase Epitaxy-Grown GaN on Sapphire by Insertion of a Low-Temperature-Deposited Buffer Layer between High-Temperature-Grown GaN
• Quantum-Confined Stark Effect due to Piezoelectric Fields in GaInN Strained Quantum Wells
• Room Temperature Halogenation of Polyimide Film Surface using Chlorine Trifluoride Gas
• An Improved Phased Array Ultrasonic Probe Using 0.91Pb(Zn_Nb_)O_3-0.09PbTiO_3 Single Crystal
• Heat Transport Analysis for Flash Lamp Annealing
• Studies on Protein and Lipid Components of Serum and Residual Yolk in Chick Embryos
• A Comparison of Visual Evoked Potentials Leading from Different Electrode Placements in Guinea Pigs
• 頭皮上からの導出によるモルモットの視覚誘発電位〔英文〕
• Electrophoretic Technique Using Cellulose Acetate Membrane Isoelectric Focusing
• Torque Measurements of Ferromagnetic Mn-Al Multilayered Films
• Magnetic Properties of Mn-Al Multilayered Films
• Transducer Matching in Ultrasonic Traveling Wave Interferometric Network Method : Acoustical Measurements and Instrumentation
• Highly Concentrated Ozone Gas for Preparing Wettable Polyimide Surface
• Numerical Evaluation of Silicon-Thin Film Growth from SiHCl_3-H_2 Gas Mixture in a Horizontal Chemical Vapor Deposition Reactor
• Morphology of Silicon Oxide Film on Silicon Wafer Surface during Its Removal Process in a Hydrogen Ambient : Surfaces, Interfaces, and Films
• Flatness Deterioration of Silicon Epitaxial Film Formed Using Horizontal Single-Wafer Epitaxial Reactor : Surfaces, Interfaces, and Films
• Time-Dependent Airborne Organic Contaimination on Silicon Wafer Surface Stored in a Plastic Box
• Neoplasms in three patients following Kawasaki disease
• Separation of aromatic and aliphatic hydrocarbon mixtures in supercritical state using asymmetric polyimide membrane
• Realization of Nitride-Based Solar Cell on Freestanding GaN Substrate
• Langasite Crystal Microbalance for Development of Reactive Surface Preparation of Silicon Carbide Film Deposition from Monomethylsilane Gas
• SEARCH FOR THE PHYSIOLOGICAL FUNCTION OF THE CONCENTRATION-SENSITIVE Na^+ CHANNEL (Na_c)(Taxonomy and Systematics,Abstracts of papers presented at the 76^ Annual Meeting of the Zoological Society of Japan)
• Room Temperature Halogenation of Polyimide Film Surface using Chlorine Trifluoride Gas
• Internal Quantum Efficiency of Whole-Composition-Range AlGaN Multiquantum Wells
• 難治性川崎病におけるT細胞活性化マーカーの上昇
• Nonpolar a-Plane AlGaN/GaN Heterostructure Field-Effect Transistors Grown on Freestanding GaN Substrate
• Lectin Histochemistry for Sugars on the Mucosal Surface of the Uterus in Pregnant Mice
• Hafnium Oxide Film Etching Using Hydrogen Chloride Gas
• Silicon Carbide Etching Using Chlorine Trifluoride Gas
• A Low-Power Multi Resolution Spectrum Sensing Architecture for a Wireless Sensor Network with Cognitive Radio
• Determination of Etch Rate Behavior of 4H–SiC Using Chlorine Trifluoride Gas
• A Low-Power Multi-Phase Oscillator with Transfer Gate Phase Coupler Enabling Even-Numbered Phase Output
• P21 and Notch Signalings in the Persistently Altered Vagina Induced by Neonatal Diethylstilbestrol Exposure in Mice
• Crystallization of Amorphous CoFeB Ferromagnetic Layers in CoFeB/MgO/CoFeB Magnetic Tunnel Junctions
• Etching Rate of Silicon Dioxide Using Chlorine Trifluoride Gas
• Sugar Expressions on the Vaginal Epithelium in Pregnant Mice
• Persorption of IgG-Fc-Coated Particulates from Intestinal Lumen into Portal Blood via Villous Columnar Epithelial Cells in Rat Small Intestine
• The Pathogenicity and Host Immune Response Associated with H5N1 Highly Pathogenic Avian Influenza Virus in Quail
• Differential Expressions of Toll-Like Receptor Genes in the Vagina of Pregnant Mice
• A Practical Design Method for a Rapid Thermal Processing System
• Water Motion in a Water Curtain Head for Cleaning a Large Glass Plate
• Immunohistochemical Detection of Toll-Like Receptor-2, -4 and -9 in Exocrine Glands Associated with Rat Alimentary Tract
• Time-Dependent Airborne Organic Contamination on Silicon Wafer Surface Stored in a Plastic Box
• Heat Transport Analysis for Flash Lamp Annealing
• Highly Concentrated Ozone Gas for Preparing Wettable Polyimide Surface
• Ultrastructural Demonstration of the Absorption and Transportation of Minute Chylomicrons by Subepithelial Blood Capillaries in Rat Jejunal Villi
• Heat Transport and Temperature Gradient in Silicon-on-Insulator Wafer during Flash Lamp Annealing Process
• Differences in Lectin-Binding Properties between the Common Mucosal Epithelium and Follicle-Associated Epithelium in the Rabbit Small Intestine
• Persorption of Bovine Lactoferrin from the Intestinal Lumen into the Systemic Circulation via the Portal Vein and the Mesenteric Lymphatics in Growing Pigs
• Gene Transcriptions of Toll-Like Receptors in the Mouse Uterus during Gestation
• Changes in Extracellular Neurotransmitters in the Cerebrum of Familial Idiopathic Epileptic Shetland Sheepdogs Using an Intracerebral Microdialysis Technique and Immunohistochemical Study for Glutamate Metabolism
• Histoplanimetrical Study on the Relationship between Invasion of Indigenous Bacteria into Intestinal Crypts and Proliferation of Epithelial Cells in Rat Ascending Colon
• Tumor Suppressor Candidate TUSC3 Expression during Rat Testis Maturation
• Nonempirical Design of Rapid Thermal Processing System
• Influence of Chemical Composition of CoFeB on Tunneling Magnetoresistance and Microstructure in Polycrystalline CoFeB/MgO/CoFeB Magnetic Tunnel Junctions
• Carbonation/Decarbonation of Ca-Solid Reactant Derived from Natural Limestone for Thermal-Energy Storage and Temperature Upgrade
• Epidemiologic Features and Prognostic Factors of Coronary Artery Lesions Associated With Kawasaki Disease Based on a 13-Year Cohort of Consecutive Cases Identified by Complete Enumeration Surveys in Wakayama, Japan

もっと見る 閉じる

スポンサーリンク