Nonempirical Design of Rapid Thermal Processing System
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概要
- 論文の詳細を見る
In order to develop a nonempirical technology to design a rapid thermal processing (RTP) system, a direct approach model using the ray tracing simulation (DARTS) is applied for designing the small RTP system composed of tungsten/halogen filament lamps, specular reflectors and a silicon wafer. The temperature profiles on the silicon wafer surface are theoretically predicted and experimentally evaluated using the two RTP systems. The quantitative agreement of the theoretically predicted and experimentally evaluated temperature profiles on the silicon surface suggests that the nonempirical design of the RTP system is possible using the DARTS model. The reflection-resolved analysis based on this model is considered to provide information on the entire path of the rays from the lamps to the silicon wafer surface and on the heat loss caused by the reflectors in the RTP system.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2001-12-15
著者
-
Sakurai Takashi
Department Of Astronomy The University Of Tokyo
-
Negishi Youichi
Department Of Chemical Engineering Science Yokohama National University
-
Suzuki Takahiro
Department Of Anesthesiology Surugadai Nihon University Hospital
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Takeuchi Takashi
Department Of Chemical Engineering Science Yokohama National University
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Habuka Hitoshi
Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
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