Silicon Carbide Etching Using Chlorine Trifluoride Gas
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概要
- 論文の詳細を見る
The etch rate, chemical reactions and etched surface of $\beta$-silicon carbide are studied in detail using chlorine trifluoride gas. The etch rate is greater than 10 μm min-1 at 723 K with a flow rate of 0.1 $\ell$ min-1 at atmospheric pressure in a horizontal reactor. The maximum etch rate at a substrate temperature of 773 K is 40 μm min-1 with a flow rate of 0.25 $\ell$ min-1. The step-like pattern that initially exists on the $\beta$-silicon carbide surface tends to be smoothed; the root-mean-square surface roughness decreases from its initial value of 5 μm to 1 μm within 15 min; this minimum value is maintained for more than 15 min. Therefore, chlorine trifluoride gas is considered to have a large etch rate for $\beta$-silicon carbide associated with making a rough surface smooth.
- 2005-03-15
著者
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Oda Satoko
Department Of Anatomy Toho University School Of Medicine
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FUKAI Yasushi
R&D Department, Kanto Denka Kogyo Co., Ltd.
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Habuka Hitoshi
Department Of Chemical Engineering Science Yokohama National University
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Aihara Masahiko
Department Of Chemical Engineering Science Yokohama National University
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Fukae Katsuya
Shibukawa Lab. Kanto Denka Kogyo Co. Ltd. 1497 Shibukawa Gunma 377-8513 Jpn
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Takeuchi Takashi
Department Of Chemical Engineering Science Yokohama National University
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Fukae Katsuya
Shibukawa Laboratory, Kanto Denka Kogyo Co., Ltd., 1497 Shibukawa, Gunma 377-8513, Japan
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Fukai Yasushi
R&D Department, Kanto Denka Kogyo Co., Ltd., 1-2-1 Marunouchi, Chiyoda, Tokyo 100-0005, Japan
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Habuka Hitoshi
Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
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