FUKAI Yasushi | R&D Department, Kanto Denka Kogyo Co., Ltd.
スポンサーリンク
概要
関連著者
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Oda Satoko
Department Of Anatomy Toho University School Of Medicine
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FUKAI Yasushi
R&D Department, Kanto Denka Kogyo Co., Ltd.
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TAKEUCHI Takashi
Department of Pediatrics, Wakayama Medical University
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Oda Satoko
Yokohama National Univ. Yokohama Jpn
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Oda Satoko
Department Of Chemical Engineering Science Yokohama National University
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AIHARA Masahiko
Department of Material Science & Chemical Engineering, Yokohama National University
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HABUKA Hitoshi
Department of Chemical Engineering Science, Yokohama National University
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FUKAE Katsuya
Shibukawa Laboratory, Kanto Denka Kogyo Co., Ltd.
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Takeuchi T
Department Of Chemical Engineering Science Yokohama National University
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Fukae Katsuya
Shibukawa Laboratory Kanto Denka Kogyo Co. Ltd.
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Habuka H
Department Of Chemical Engineering Science Yokohama National University
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Habuka Hitoshi
Department Of Chemical Engineering Science Yokohama National University
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Aihara Masahiko
Department Of Chemical Engineering Science Yokohama National University
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Fukae Katsuya
Shibukawa Lab. Kanto Denka Kogyo Co. Ltd. 1497 Shibukawa Gunma 377-8513 Jpn
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Takeuchi Takashi
Department Of Chemical Engineering Science Yokohama National University
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Fukae Katsuya
Shibukawa Laboratory, Kanto Denka Kogyo Co., Ltd., 1497 Shibukawa, Gunma 377-8513, Japan
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Fukai Yasushi
R&D Department, Kanto Denka Kogyo Co., Ltd., 1-2-1 Marunouchi, Chiyoda, Tokyo 100-0005, Japan
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Habuka Hitoshi
Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
著作論文
- Silicon Carbide Etching Using Chlorine Trifluoride Gas
- Silicon Carbide Etching Using Chlorine Trifluoride Gas